Handbook of Thin Film Deposition

Handbook of Thin Film Deposition

4th Edition - February 23, 2018

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  • Editors: Krishna Seshan, Dominic Schepis
  • Paperback ISBN: 9780128123119
  • eBook ISBN: 9780128123126

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Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability.

Key Features

  • Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes
  • Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries
  • Features a new chapter discussing Gates Dielectrics


Students and researchers from semiconductor physics and microelectronic technologies, partly from the field of optical thin films

Table of Contents

  • Section 1 - SCALING
    1. A Perspective on Today’s Scaling Challenges and Possible Future Direction
    2. Limits and Hurdles To Continued Cmos Scaling
    3. Reliability Issues: Reliability Imposed Limits to Scaling
    4. Thermal Engineering at the Limits of the CMOS Era

    5. Limits Of Gate Dielectrics Scaling
    6. Process Technology for Copper Interconnects
    7. Sputter Processing
    8. Thin Film Deposition for Front End of Line: The Effect of the Semiconductor Scaling, Strain Engineering and Pattern Effects
    9. Equipment in CVD Processing
    10. CMP Method and Practice
    11. Atomic Layer Deposition: Fundamentals, Practice and Challenges
    12. Optical Thin Films
    13. Semiconductor Memory

Product details

  • No. of pages: 470
  • Language: English
  • Copyright: © William Andrew 2018
  • Published: February 23, 2018
  • Imprint: William Andrew
  • Paperback ISBN: 9780128123119
  • eBook ISBN: 9780128123126

About the Editors

Krishna Seshan

Formerly Assistant Professor in Materials Science at the University of Arizona and has extensive professional experience as a technologist with both the IBM and Intel Corporations.

Affiliations and Expertise

Formerly Assistant Professor, Materials Science, University of Arizona

Dominic Schepis

Currently a principal member of the technical staff and serves on the patent evaluation board at GlobalFoundries Corporation in East Fishkill, NY, working on process development for 14nm CMOS. A graduate from Rensselaer Polytechnic Institute, he joined IBM Microelectronics in 1981 and has worked on a variety of research and development projects including: reactive ion etching, epitaxial film growth, process integration and thin film processing. During his tenure there, he published 25 technical journal papers and has over 100 US patents issued.

Affiliations and Expertise


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