Handbook of Ion Beam Processing Technology

1st Edition

Principles, Deposition, Film Modification and Synthesis

Authors:

  • Jerome J. Cuomo
  • Stephen M. Rossnagel
  • Harold R. Kaufman
  • Handbook of Ion Beam Processing Technology

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    Description

    Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

    Readership

    Engineers, technicians, and plant personnel in the semiconductor and related industries.

    Table of Contents

    1. Perspective on Past, Present and Future Uses of Ion Beam Technology 1.1 Introduction 1.2 Past Technology 1.3 Present Capabilities 1.4 Future Trends 1.5 References Part I. Ion Beam Technology 2. Gridded Broad-beam Ion Sources 2.1 Introduction 2.2 General Description 2.3 Discharge Chamber 2.4 Ion Optics 2.5 Production Applications 2.6 Target Contamination 2.7 Concluding Remarks 2.8 References 3. ECR Ion Sources 3.1 Introduction 3.2 Theory of Operation 3.3 Types of Sources and Characteristics 3.4 Etching 3.5 Deposition 3.6 References 4. Hall Effect Ion Sources 4.1 Introduction 4.2 End-hall Ion Source 4.3 Closed Drift Ion Source 4.4 Concluding Remarks 4.5 References 5. Ionized Cluster Beam (ICB) Deposition and Epitaxy 5.1 Introduction 5.2 Experiment 5.3 Aspects of Film Deposition with ICB 5.4 Summary 5.5 References Part II. Sputtering Phenomena 6. Quantitative Sputtering 6.1 Introduction 6.2 Total Sputter Yield Considerations 6.3 Differential Sputter Yield Considerations 6.4 Experimental Considerations for Sputter Yield Measurements 6.5 Total Sputter Yield Measurements 6.6 Differential Yield Measurements: Angular and Energy Distributions 6.7 Concluding Remarks 6.8 References 7. Laser-induced Fluorescence as a Tool for the Study of Ion Beam Sputtering 7.1 Introduction 7.2 Experimental Techniq

    Details

    No. of pages:
    456
    Language:
    English
    Copyright:
    © 1989
    Published:
    Imprint:
    William Andrew
    Print ISBN:
    9780815511991
    Electronic ISBN:
    9780815517573