Secure CheckoutPersonal information is secured with SSL technology.
Free ShippingFree global shipping
No minimum order.
1. Noncontact Scanning Electrostatic Force Microscope
2. Quartz Tuning Fork Atomic Force Microscope
3. Micropipette Ball Probing System
4. Low-Force Elastic Beam Surface Profiler
5. Linear-Scan Micro Roundness Measuring Machine
6. Micro-Gear Measuring Machine
7. On-Machine Length Gauge Surface Profiler
8. On-Machine Air-Bearing Surface Profiler
9. On-Machine Atomic Force Microscope
10. On-Machine Roll Profiler
11. In-Process Fast Tool Servo Profiler
12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
- Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
- Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
- Assesses the best techniques for repairing micro-defects
Academics and R&D industry researchers in Materials Science, Engineering, and Nanotechnology
- No. of pages:
- © Elsevier 2021
- 2nd November 2020
- Paperback ISBN:
Prof. Wei Gao is the Chair of the Precision Nanometrology Laboratory and Director of the Research Center for Precision Nanosystems at the Department of Fine Mechanics in the Graduate School of Engineering, Tohoku University, Japan. His research focuses on precision engineering, precision metrology, micro/nano-nanometrology, optical sensors, surface metrology, on-machine and in-process measurement, and motion measurement.
Chair, Precision Nanometrology Laboratory; Director, Research Center for Precision Nanosystems, Department of Fine Mechanics, Graduate School of Engineering, Tohoku University, Japan
Elsevier.com visitor survey
We are always looking for ways to improve customer experience on Elsevier.com.
We would like to ask you for a moment of your time to fill in a short questionnaire, at the end of your visit.
If you decide to participate, a new browser tab will open so you can complete the survey after you have completed your visit to this website.
Thanks in advance for your time.