Surface Metrology for Micro- and Nanofabrication
- 1st Edition - October 21, 2020
- Author: Wei Gao
- Language: English
- Paperback ISBN:9 7 8 - 0 - 1 2 - 8 1 7 8 5 0 - 8
- eBook ISBN:9 7 8 - 0 - 1 2 - 8 1 7 8 5 1 - 5
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or compon… Read more
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Request a sales quote- Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
- Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
- Assesses the best techniques for repairing micro-defects
Academics and R&D industry researchers in Materials Science, Engineering, and Nanotechnology
1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness
- No. of pages: 448
- Language: English
- Edition: 1
- Published: October 21, 2020
- Imprint: Elsevier
- Paperback ISBN: 9780128178508
- eBook ISBN: 9780128178515
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