Surface Metrology for Micro- and Nanofabrication

1. Noncontact Scanning Electrostatic Force Microscope
2. Quartz Tuning Fork Atomic Force Microscope
3. Micropipette Ball Probing System
4. Low-Force Elastic Beam Surface Profiler
5. Linear-Scan Micro Roundness Measuring Machine
6. Micro-Gear Measuring Machine
7. On-Machine Length Gauge Surface Profiler
8. On-Machine Air-Bearing Surface Profiler
9. On-Machine Atomic Force Microscope
10. On-Machine Roll Profiler
11. In-Process Fast Tool Servo Profiler
12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

• Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
• Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
• Assesses the best techniques for repairing micro-defects

Academics and R&D industry researchers in Materials Science, Engineering, and Nanotechnology