Description

Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.

Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems.

Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions.

Key Features

  • Outlines industrial applications for smart sensors and smart MEMS
  • Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature
  • Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers

Readership

Academics in the fields of electronics and sensor technologies; Materials scientists; Electrical engineers working in the microelectronics, sensors, and micromechanics industry

Table of Contents

Part 1 Smart sensors for industrial applications: What makes sensor devices and microsystems ‘intelligent’ or ‘smart’? Direct interface circuits for sensors; Capacitive sensors for displacement measurement in the sub-nanometer range; Integrated inductive displacement sensors for harsh industrial environments; Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range; Integrated polarization analyzing CMOS image sensors for detection and signal processing; Advanced interfaces for resistive sensors; Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications; Advanced optical incremental sensors: encoders and interferometers. Part 2 Smart micro-electro-mechanical systems (MEMS) for industrial applications: Microfabrication technologies used for creating smart devices for industrial applications; Microactuators: Design and technology; Dynamic behavior of smart MEMS in industrial applications; MEMS integrating motion and displacement sensors; MEMS print heads for industrial printing; Photovoltaic and fuel cells in power MEMS for smart energy management; Radio frequency (RF)-MEMS for smart communication microsystems; Smart acoustic sensor array (SASA) system for real-time sound processing applications.

Details

No. of pages:
560
Language:
English
Copyright:
© 2014
Published:
Imprint:
Woodhead Publishing
Print ISBN:
9780857095022
Electronic ISBN:
9780857099297

About the editors

A. Luque

Dr Antonio Luque is an Associate Professor at the University of Seville, Spain.

S Nihtianov

Dr Stoyan Nihtianov is an Associate Professor at the Delft University of Technology, The Netherlands.