SEM Microcharacterization of Semiconductors - 1st Edition - ISBN: 9780123538550, 9781483288673

SEM Microcharacterization of Semiconductors, Volume 12

1st Edition

Editors: D. Holt D. Joy
eBook ISBN: 9781483288673
Hardcover ISBN: 9780123538550
Imprint: Academic Press
Published Date: 28th January 1989
Page Count: 452
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Table of Contents

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.


Description

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Readership

Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.


Details

No. of pages:
452
Language:
English
Copyright:
© Academic Press 1989
Published:
Imprint:
Academic Press
eBook ISBN:
9781483288673
Hardcover ISBN:
9780123538550

About the Editors

D. Holt Editor

Affiliations and Expertise

Imperial College of Science and Technology

D. Joy Editor

Affiliations and Expertise

University of Tennessee