SEM Microcharacterization of Semiconductors, Volume 12
1st Edition
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Table of Contents
Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.
Description
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
Readership
Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.
Details
- No. of pages:
- 452
- Language:
- English
- Copyright:
- © Academic Press 1989
- Published:
- 28th January 1989
- Imprint:
- Academic Press
- Hardcover ISBN:
- 9780123538550
- eBook ISBN:
- 9781483288673
Ratings and Reviews
About the Editors
D. Holt Editor
Affiliations and Expertise
Imperial College of Science and Technology
D. Joy Editor
Affiliations and Expertise
University of Tennessee