
SEM Microcharacterization of Semiconductors
Free Global Shipping
No minimum orderDescription
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
Readership
Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.
Table of Contents
- Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.
Product details
- No. of pages: 452
- Language: English
- Copyright: © Academic Press 1989
- Published: January 28, 1989
- Imprint: Academic Press
- eBook ISBN: 9781483288673
About the Editors
D. Holt
Affiliations and Expertise
Imperial College of Science and Technology
D. Joy
Affiliations and Expertise
University of Tennessee
Ratings and Reviews
There are currently no reviews for "SEM Microcharacterization of Semiconductors"