SEM Microcharacterization of Semiconductors

SEM Microcharacterization of Semiconductors

1st Edition - January 28, 1989

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  • Editors: D. Holt, D. Joy
  • eBook ISBN: 9781483288673

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Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.


Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.

Table of Contents

  • Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

Product details

  • No. of pages: 452
  • Language: English
  • Copyright: © Academic Press 1989
  • Published: January 28, 1989
  • Imprint: Academic Press
  • eBook ISBN: 9781483288673

About the Editors

D. Holt

Affiliations and Expertise

Imperial College of Science and Technology

D. Joy

Affiliations and Expertise

University of Tennessee

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