Quantitative Data Processing in Scanning Probe Microscopy

Quantitative Data Processing in Scanning Probe Microscopy

SPM Applications for Nanometrology

1st Edition - November 19, 2012

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  • Author: Petr Klapetek
  • eBook ISBN: 9781455730599

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Accurate measurement at the nano-scale – nanometrology – is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture of a specimen by scanning with a physical probe; unrestrained by the wavelength of light or electrons, the resolution obtainable with this technique can resolve atoms. SPM instruments include the Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM). Despite tremendous advances in Scanning Probe Microscopy (SPM) over the last twenty years, its potential as a quantitative measurement tool have not been fully realized, due to challenges such as the complexity of tip/sample interaction. In this book, Petr Klapetek uses the latest research to unlock SPM as a toolkit for nanometrology in fields as diverse as nanotechnology, surface physics, materials engineering, thin film optics, and life sciences. Klapetek's considerable experience of Quantitive Data Processing, using software tools, enables him to not only explain the microscopy techniques, but also to demystify the analysis and interpretation of the data collected. In addition to the essential principles and theory of SPM metrology, Klapetek provides readers with a number of worked examples to demonstrate typical ways of solving problems in SPM analysis. Source data for the examples as well as most of the described open source software tools are available on a companion website.

Key Features

  • Unlocks the use of Scanning Probe Microscopy (SPM) for nanometrology applications in engineering, physics, life science and earth science settings
  • Provides practical guidance regarding areas of difficulty such as tip/sample interaction and calibration – making metrology applications achievable
  • Gives guidance on data collection and interpretation, including the use of software-based modeling (using applications that are mostly freely available)


Industrial and academic engineers and scientists working in nanotechnology, surface physics, materials engineering, thin film optics, life sciences, etc; SPM users and technicians; engineers and scientists utilizing SPM data

Table of Contents

  • Preface

    Chapter 1. Motivation

    1.1 Why “Quantitative” Scanning Probe Microscopy?

    1.2 What is Scanning Probe Microscopy?

    1.3 Basic Metrology Concepts

    1.4 Scanning Probe Microscopy and Quantitative Measurements


    Chapter 2. Instrumentation Principles

    2.1 Few Components for the Price of a House?

    2.2 Novel Approaches


    Chapter 3. Data Models

    3.1 From Analog to Digital

    3.2 Data Acquisition Basics

    3.3 Image Sampling

    3.4 Data Storage

    3.5 Mechanical and Thermal Drifts

    3.6 Noise

    3.7 Try it Yourself

    3.8 Tips and Tricks


    Chapter 4. Basic Data Processing

    4.1 A Daily Bread?

    4.2 Data Visualization

    4.3 Local Data Manipulation

    4.4 Global Data Manipulation

    4.5 Multiple Channel Operations

    4.6 Scripting

    4.7 Data Generation

    4.8 Other Freely Available Data Processing Software

    4.9 Try it Yourself

    4.10 Tips and Tricks


    Chapter 5. Dimensional Measurements

    5.1 The Easiest Measurement?

    5.2 Atomic Force Microscopy Principles

    5.3 Atomic Force Microscopy Dimensional Data Measurement and Evaluation

    5.4 Atomic Force Microscopy and Quantitative Dimensional Metrology

    5.5 Try it Yourself

    5.6 Tips and Tricks


    Chapter 6. Force and Mechanical Properties

    6.1 What About Forces in Force Microscopy?

    6.2 Forces and Force-Distance Curves

    6.3 Force Interaction Modeling

    6.4 Quantitative Force Measurements

    6.5 Local Mechanical and Material Properties Mapping

    6.6 Try it Yourself

    6.7 Tips and Tricks


    Chapter 7. Friction and Lateral Forces

    7.1 What Opposes the Tip Motion?

    7.2 Forces

    7.3 Friction Force Modeling

    7.4 Quantitative Friction Force Measurements

    7.5 Special Modes

    7.6 Try it Yourself

    7.7 Tips and Tricks


    Chapter 8. Electrostatic Fields

    8.1 What is Above the Sample? See the Invisible!

    8.2 Basic Relations

    8.3 Modeling

    8.6 Try it Yourself

    8.7 Tips and Tricks


    Chapter 9. Magnetic Fields

    9.1 Magnetic Fields Measurements

    9.6 Try it Yourself

    9.7 Tips and Tricks


    Chapter 10. Local Current Measurements

    10.1 Where it All Started

    10.2 Tip-Sample Junction Models

    10.3 Scanning Tunneling Microscopy and Related Methods

    10.4 Conductive Atomic Force Microscopy

    10.5 Try it Yourself

    10.6 Tips and Tricks


    Chapter 11. Thermal Measurements

    11.1 Really a Hot Topic?

    11.2 Nano- and Microscale Heat Flow

    11.3 Instrumentation

    11.4 Data Interpretation

    11.5 Try it Yourself

    11.6 Tips and Tricks


    Chapter 12. Optical Measurements

    12.1 Have a Look at Nanoscale

    12.2 Fundamental Phenomena

    12.3 Basic Techniques

    12.4 Numerical Analysis

    12.5 Quantitative Measurements

    12.7 Tips and Tricks


    Chapter 13. Sample Data Files

    13.1 Morphology, Tip-Sample Artifacts, etc.

    13.2 Mechanical Properties

    13.3 Electric and Magnetic Properties

    13.4 Thermal Properties

    13.5 Optical Properties

    Chapter 14. Numerical Modeling Techniques

    14.1 Density Functional Theory

    14.2 Classical Molecular Dynamics

    14.3 Dislocation Dynamics

    14.4 Finite Difference Method

    14.5 Finite Element Method

    14.6 Finite Difference in Time Domain method



Product details

  • No. of pages: 336
  • Language: English
  • Copyright: © William Andrew 2012
  • Published: November 19, 2012
  • Imprint: William Andrew
  • eBook ISBN: 9781455730599

About the Author

Petr Klapetek

Petr Klapetek is Head, Department of Nanometrology at the Czech Metrology Institute, Czech Republic. His research focuses on the metrology scanning probe microscope (SPM) construction, a key standard for nanometrology.He also participates in the Gwyddion project, focused on the creation of multiplatform open-source software for scanning probe microscopy (SPM) data analysis.

Affiliations and Expertise

Czech Metrology Institute

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