Quantitative Data Processing in Scanning Probe Microscopy
SPM Applications for Nanometrology
Resources
Description
Key Features
- Unlocks the use of Scanning Probe Microscopy (SPM) for nanometrology applications in engineering, physics, life science and earth science settings.
- Provides practical guidance regarding areas of difficulty such as tip/sample interaction and calibration – making metrology applications achievable.
- Gives guidance on data collection and interpretation, including the use of software-based modeling (using applications that are mostly freely available).
Readership
Industrial and academic engineers and scientists working in nanotechnology, surface physics, materials engineering, thin film optics, life sciences, etc; SPM users and technicians; engineers and scientists utilizing SPM data
Table of Contents
Preface
Chapter 1. Motivation
1.1 Why “Quantitative” Scanning Probe Microscopy?
1.2 What is Scanning Probe Microscopy?
1.3 Basic Metrology Concepts
1.4 Scanning Probe Microscopy and Quantitative Measurements
References
Chapter 2. Instrumentation Principles
2.1 Few Components for the Price of a House?
2.2 Novel Approaches
References
Chapter 3. Data Models
3.1 From Analog to Digital
3.2 Data Acquisition Basics
3.3 Image Sampling
3.4 Data Storage
3.5 Mechanical and Thermal Drifts
3.6 Noise
3.7 Try it Yourself
3.8 Tips and Tricks
References
Chapter 4. Basic Data Processing
4.1 A Daily Bread?
4.2 Data Visualization
4.3 Local Data Manipulation
4.4 Global Data Manipulation
4.5 Multiple Channel Operations
4.6 Scripting
4.7 Data Generation
4.8 Other Freely Available Data Processing Software
4.9 Try it Yourself
4.10 Tips and Tricks
References
Chapter 5. Dimensional Measurements
5.1 The Easiest Measurement?
5.2 Atomic Force Microscopy Principles
5.3 Atomic Force Microscopy Dimensional Data Measurement and Evaluation
5.4 Atomic Force Microscopy and Quantitative Dimensional Metrology
5.5 Try it Yourself
5.6 Tips and Tricks
References
Chapter 6. Force and Mechanical Properties
6.1 What About Forces in Force Microscopy?
6.2 Forces and Force-Distance Curves
6.3 Force Interaction Modeling
6.4 Quantitative Force Measurements
6.5 Local Mechanical and Material Properties Mapping
6.6 Try it Yourself
6.7 Tips and Tricks
References
Chapter 7. Friction and Lateral Forces
7.1 What Opposes the Tip Motion?
7.2 Forces
7.3 Friction Force Modeling
7.4 Quantitative Friction Force Measurements
7.5 Special Modes
7.6 Try it Yourself
7.7 Tips and Tricks
References
Chapter 8. Electrostatic Fields
8.1 What is Above the Sample? See the Invisible!
8.2 Basic Relations
8.3 Modeling
8.6 Try it Yourself
8.7 Tips and Tricks
References
Chapter 9. Magnetic Fields
9.1 Magnetic Fields Measurements
9.6 Try it Yourself
9.7 Tips and Tricks
References
Chapter 10. Local Current Measurements
10.1 Where it All Started
10.2 Tip-Sample Junction Models
10.3 Scanning Tunneling Microscopy and Related Methods
10.4 Conductive Atomic Force Microscopy
10.5 Try it Yourself
10.6 Tips and Tricks
References
Chapter 11. Thermal Measurements
11.1 Really a Hot Topic?
11.2 Nano- and Microscale Heat Flow
11.3 Instrumentation
11.4 Data Interpretation
11.5 Try it Yourself
11.6 Tips and Tricks
References
Chapter 12. Optical Measurements
12.1 Have a Look at Nanoscale
12.2 Fundamental Phenomena
12.3 Basic Techniques
12.4 Numerical Analysis
12.5 Quantitative Measurements
12.7 Tips and Tricks
References
Chapter 13. Sample Data Files
13.1 Morphology, Tip-Sample Artifacts, etc.
13.2 Mechanical Properties
13.3 Electric and Magnetic Properties
13.4 Thermal Properties
13.5 Optical Properties
Chapter 14. Numerical Modeling Techniques
14.1 Density Functional Theory
14.2 Classical Molecular Dynamics
14.3 Dislocation Dynamics
14.4 Finite Difference Method
14.5 Finite Element Method
14.6 Finite Difference in Time Domain method
References
Index
Product details
- No. of pages: 336
- Language: English
- Copyright: © William Andrew 2012
- Published: November 19, 2012
- Imprint: William Andrew
- eBook ISBN: 9781455730599