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Ion Beam Processing of Materials and Deposition Processes of Protective Coatings - 1st Edition - ISBN: 9780444824103, 9780444596314

Ion Beam Processing of Materials and Deposition Processes of Protective Coatings, Volume 53

1st Edition

Editors: P.L.F. Hemment J. Gyulai R.B. Simonton I. Yamada J.-P. Thomas P. Thévenard W.L. Brown P.B. Barna G. Wahl Yves Pauleau
eBook ISBN: 9780444596314
Imprint: North Holland
Published Date: 18th July 1996
Page Count: 266
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Table of Contents

(Please contact the publisher for a complete list of contents). Part I: Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation and Symposium C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues. I. Fundamental aspects of cluster collisions. II. Production, acceleration and diagnostics of high intensity beams of molecular ions. III. Surface phenomena, photon, electron or ion emission, sputtering. IV. Cluster projectiles in materials processing. V. Insulating materials. VI. Silicon - defects and damage. VII. Silicon - processing issues. VIII. Oxygen/silicon system. IX. Engineering and materials processing. X. Group IV semiconductors. Part II: Symposium H on Advanced Deposition Processes and Characterization of Protective Coatings. Plasma-enhanced CVD processes. Ion-surface interactions. Hard coatings. Oxide coatings. Characterization of coatings. Carbon-based coatings. Solid lubricant coatings. Tribological coatings. Surface treatments. Diffusion barrier coatings on plastics. Laser-induced deposition processes.


Containing the proceedings of three symposia in the E-MRS series this book is divided into two parts. Part one is concerned with ion beam processing, a particularly powerful and versatile technology which can be used both to synthesise and modify materials, including metals, semiconductors, ceramics and dielectrics, with great precision and excellent control. Furthermore it also deals with the correlated effects in atomic and cluster ion bombardment and implantation.

Part two deals with the deposition techniques, characterization and applications of advanced ceramic, metallic and polymeric coatings or thin films for surface protection against corrosion, erosion, abrasion, diffusion and for lubrication of contracting surfaces in relative motion.


No. of pages:
© North Holland 1996
18th July 1996
North Holland
eBook ISBN:

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About the Editors

P.L.F. Hemment

Affiliations and Expertise

Guildford, Surrey, U.K.

J. Gyulai

Affiliations and Expertise

Budapest, Hungary

R.B. Simonton

Affiliations and Expertise

Beverly, MA, USA

I. Yamada

Affiliations and Expertise

Kyoto, Japan

J.-P. Thomas

Affiliations and Expertise

Villeurbanne, France

P. Thévenard

Affiliations and Expertise

Villeurbanne, France

W.L. Brown

Affiliations and Expertise

Murray Hill, NJ, USA

P.B. Barna

Affiliations and Expertise

Budapest, Hungary

G. Wahl

Affiliations and Expertise

Braunschweig, Germany

Yves Pauleau

Affiliations and Expertise

National Polytechnic Institute of Grenoble, France