Interlayer Dielectrics for Semiconductor Technologies

Interlayer Dielectrics for Semiconductor Technologies

1st Edition - October 13, 2003

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  • Editors: Shyam Murarka, Moshe Eizenberg, Ashok Sinha
  • eBook ISBN: 9780080521954

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.

Key Features

* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume
* written by renowned experts in the field
* Provides an up-to-date starting point in this young research field.


Materials Scientists, researchers and professionals with semiconductor technologies.

Table of Contents

  • Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies

Product details

  • No. of pages: 464
  • Language: English
  • Copyright: © Academic Press 2003
  • Published: October 13, 2003
  • Imprint: Academic Press
  • eBook ISBN: 9780080521954

About the Editors

Shyam Murarka

Moshe Eizenberg

Ashok Sinha

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