* written by renowned experts in the field
* Provides an up-to-date starting point in this young research field.
Table of Contents
- Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies
- No. of pages: 464
- Language: English
- Copyright: © Academic Press 2003
- Published: October 13, 2003
- Imprint: Academic Press
- eBook ISBN: 9780080521954
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