This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.


Researchers dealing with electronic materials, fabrication, and characterization.

Table of Contents

Volume 1 Deposition and Processing
1 Methods of deposition of hydrogenated amorphous silicon for device applications
2 Atomic Layer Deposition
3 Laser Applications in Transparent Conducting Oxide Thin Film Processing
4 Cold Plasma Processing in Surface Science and Technology
5 Electrochemical Formation of Thin Films of Binary III-V Compounds
6 Nucleation, Growth and Crystallization of Thin Films
7 Ion Implant Doping and Isolation of GaN and Related Materials
8 Plasma Etching of GaN and Related Materials
9 Residual Stresses in Physically Vapor Deposited Thin Films
10 Langmuir-Blodgett Films of Biological Molecules
11 Structure Formation During Electrocrystallization of Metal Films
12 Epitaxial Thin Films of Intermetallic Compounds
13 Pulsed Laser Deposition of Thin Films: Expectations and Reality
14 b"-Alumina Single-Crystal Films

Volume 2 Characterization and Spectroscopy
1 Classification of Cluster Morphologies
2 The Band Structure and Orientations of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies
3 Superhard Thin Film Coatings in C-B-N Systems: Growth and Characterization
4 ATR Spectroscopy of Thin Films
5 Ion Beam Characterization in Superlattices 6 In-situ Real Time Spectroscopic Ellipsometry Studies: Carbon-based Materials and Metallic TiNx Thin Films Growth
7 In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric and Metal Thin Films
8 Photocurrent Spectroscopy of Thin Passive Films
9 Electron Energy Loss Spectroscopy for Surface Stu


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© 2002
Academic Press
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About the author

Hari Nalwa

Dr. H. S. Nalwa is the Managing Director of the Stanford Scientific Corporation, Los Angeles, California. He was Head of Department and R&D Manager at the Ciba Specialty Chemicals Corporation in Los Angeles (1999-2000) and a staff scientist at the Hitachi Research Laboratory, Hitachi Ltd., Japan (1990-1999). He has authored more than 150 scientific articles and 18 patents on electronic and photonic materials and devices. He has edited the following books: Ferroelectric Polymers (Marcel Dekker, 1995), Nonlinear Optics of Organic Molecules and Polymers (CRC Press, 1997), Organic Electroluminescent Materials and Devices (Gordon & Breach, 1997), Handbook of Organic Conductive Molecules and Polymers, Vol. 1-4 (John Wiley & Sons, 1997), Low and High Dielectric Constant Materials Vol. 1-2 (Academic Press, 1999), Handbook of Nanostructured Materials and Nanotechnology, Vol. 1-5 (Academic Press, 1999), Handbook of Advanced Electronic and Photonic Materials and Devices, Vol. 1-10 (Academic Press, 2000), Advanced Functional Molecules and Polymers, Vol. 1-4 (Gordon & Breach, 2001), Photodetectors and Fiber Optics (Academic Press, 2001), Supramolecular Photosensitive and Electroactive Materials (Academic Press, 2001), Nanostructured Materials and Nanotechnology (Academic Press, 2001), Handbook of Thin Film Materials, Vol. 1-5 (Academic Press, 2001), and Handbook of Surfaces and Interfaces of Materials, Vol. 1-5 (Academic Press, 2001). The Handbook of Nanostructured Materials and Nanotechnology (Vol. 1-5) edited by him received the 1999 Award of Excellence from the Association of American Publishers.Dr. Nalwa serves on the editorial board of the Journal of Macromolecular Science-Physics, Applied Organometallic Chemistry (1993-1999), International Journal of Photoenergy,andPhotonics Science News. He was the founder and Editor-in-Chief of the Journal of Porphyrin

Affiliations and Expertise

Formerly of Hitachi Research Laboratory, Japan