Handbook of Sputter Deposition Technology

Preface

Part I: Fundamentals of Sputtering

1. Thin Films and Nanomaterials

1.1 Thin Films and Nanomaterials

1.2 Thin Film Devices and MEMS

1.3 Thin Film Deposition

1.4 Characterization of Thin Films

1.5 Sputtering as a Nanomaterial Engineering

References

2. Sputtering Phenomena

2.1 Sputter Yield

2.2 Sputtered Atoms

2.3 Mechanism of Sputtering

References

3. Sputtering Systems

3.1 Gas Discharge

3.2 Sputtering Systems

3.3 Practical Aspects of Sputtering Systems

References

Part II: Theory and Practice: Sputtering Deposition of Functional Thin Films

4. Computer Simulation

4.1 Features of Sputter Deposition

4.2 Roles of Sputtering Gas in Sputter Deposition

4.3 Significance of Analysis of the Transport Process of Sputtered Particles Through Sputtering Gas

4.4 Analysis of the Transport Process of Sputtered Particles by MC Method

4.5 Applications

4.6 Summary

References

5. Basic Process of Sputtering Deposition

5.1 Control of Film Quality

5.2 Reactive Sputtering–

5.3 Typical Deposition Conditions of Functional Thin Films

References

6. Functional Thin Films

6.1 ZnO Thin Films

6.2 Compound Oxide Thin Films

6.3 Nitrides, Carbides, Silicates, Selenides

6.4 Amorphous Thin Films

6.5 Miscellaneous

References

Part III: Sputtering Technology for Nanomaterials and Thin Film MEMS

7. Ferroelectric Thin Films

7.1 Ferroelectric Thin Film Materials

7.2 Control of Thin Film Structure

7.3 Nanometer Structure

References

8. Thin Film MEMS

8.1 Thin Film Materials for MEMS

8.2 PZT-Based Thin Film MEMS

8.3 High-Performance PZT-Based Thin Films for MEMS

References

9. Micro-Fabrication by Sputtering

9.1 Classification of Sputter Etching

9.2 Ion Beam Sputter Etching

9.3 Diode Sputter Etching

9.4 Plasma Etching

9.5 Deposition into Deep Trench Structure

9.6 Compact Plasma System

References

Appendix 1: Fundamental Physical Constants

Appendix 2: Table of Conversion Factors

Appendix 3: Electric Units, Their Symbols and Conversion Factors

Postscript

Index