Handbook of Mems for Wireless and Mobile Applications - 1st Edition - ISBN: 9780857092717, 9780857098610

Handbook of Mems for Wireless and Mobile Applications

1st Edition

Editors: Deepak Uttamchandani
eBook ISBN: 9780857098610
Hardcover ISBN: 9780857092717
Imprint: Woodhead Publishing
Published Date: 31st August 2013
Page Count: 640
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Table of Contents

Contributor contact details

Woodhead Publishing Series in Electronic and Optical Materials



Part I: RF MEMS as an enabling technology for wireless applications

Chapter 1: Overview of RF MEMS technology and applications


1.1 Introduction

1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations

1.3 RF MEMS design challenges

1.4 RF MEMS applications

1.5 Conclusion

1.6 Sources of further information and advice

1.7 Acknowledgements

Chapter 2: Overview of wireless techniques for use with MEMS


2.1 Introduction

2.2 Transport layer issues

2.3 Network layer mobility issues

2.4 Data-link layer

2.5 Physical layer

2.6 The wireless link budget

2.7 Physical layer system design

2.8 Conclusion

Chapter 3: RF MEMS fabrication technologies


3.1 Introduction

3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses

3.3 Technologies for smart RF MEMS

3.4 Highlights on specific key steps in RF MEMS fabrication

3.5 Towards integrated technology for microsystem implementation

3.6 Emerging technologies in wireless applications

3.7 Conclusion

3.8 Acknowledgements

Chapter 4: RF MEMS passive components for wireless applications


4.1 Introduction

4.2 RF MEMS passive components and their applications

4.3 High-performance passive components enabled by RF MEMS technology

4.4 Complex networks based on RF MEMS passive components

4.5 Conclusion

Chapter 5: RF MEMS phase shifters for wireless applications


5.1 Introduction

5.2 Switched-line phase shifter

5.3 Loaded-line phase shifter

5.4 Reflection-type phase shifter

5.5 Distributed-line phase shifter

5.6 Mixed-architectures and exotic phase shifters

5.7 Towards global manufacturing

5.8 Applications

5.9 Conclusion

Chapter 6: RF MEMS antennas for wireless applications


6.1 Introduction

6.2 RF MEMS antennas

6.3 Reconfigurable feeding networks

6.4 Reconfigurable antennas

6.5 Design considerations

6.6 Conclusion and future trends

6.7 Sources of further information and advice

Chapter 7: RF MEMS-based wireless architectures and front-ends


7.1 Introduction

7.2 Communication standards

7.3 Receivers, transmitters and transceivers: basic architectures

7.4 Conventional component technology

7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture

7.6 Diversity in receivers and transmitters

7.7 Multi-input multi-output (MIMO) systems

7.8 Systems-on-a-chip

7.9 Conclusion

Chapter 8: RF MEMS technology for next-generation wireless communications


8.1 Introduction

8.2 RF MEMS technology

8.3 RF MEMS technology for high-performance passive components

8.4 Technology platform for the fabrication of RF MEMS complex circuits

8.5 Some examples of high-performance devices enabled by the RF MEMS technology

8.6 Conclusion

Chapter 9: Wafer-level packaging technology for RF MEMS


9.1 Introduction

9.2 Wafer -level zero-level packaging for RF MEMSSS

9.3 Electrical effects of the packaging material on the packaged devices

9.4 Packaging with hard cap materials

9.5 Packaging with a polymer cap

9.6 Conclusion

Chapter 10: Reliability of RF MEMS


10.1 Introduction

10.2 Overview of failure mechanisms in RF MEMS

10.3 Charging in RF MEMS

10.4 Analytical modelling

10.5 Electrostatic discharge

10.6 Reliability issues of MEMS packages

10.7 Conclusion

Part II: Wireless techniques and applications of wireless MEMS

Chapter 11: Energy harvesters for powering wireless systems


11.1 Introduction

11.2 Kinetic energy harvesters

11.3 Design of kinetic energy harvesters

11.4 Other typologies of energy harvesters

11.5 Conclusion

11.6 References

11.7 Appendix: list of symbols

Chapter 12: MEMS wireless implantable systems: historical review and perspectives


12.1 Introduction

12.2 Basic considerations and characteristics of wireless MEMS implantable systems

12.3 Significant research on radio frequency implantable systems from 1955 to 1975

12.4 Progress of implantable systems from 1980 to 2010

12.5 Challenges of implantable/attached electronics

12.6 Conclusion and future trends

12.7 Acknowledgements

Chapter 13: Wireless considerations in ocular implants based on microsystems


13.1 Introduction

13.2 Challenges of wireless ocular implants

13.3 Considerations of ocular microsystems

13.4 Applications of wireless microsystems in ocular implants

13.5 Necessary improvements in wireless ocular implants

13.6 Conclusion

Chapter 14: MEMS-based wireless intraocular pressure sensors


14.1 Introduction

14.2 Passive miniature implants for intraocular pressure (IOP) sensing

14.3 Introduction of active MEMS systems for IOP implants

14.4 Flexible parylene platforms for long-term MEMS implants

14.5 Design of custom ultra-low-power autonomous IOP sensors

14.6 Active and passive MEMS contact lenses for IOP monitoring

14.7 Conclusion

Chapter 15: Drug delivery using wireless MEMS


15.1 Introduction

15.2 Wireless power and data for drug delivery applications

15.3 A MEMS approach to drug delivery

15.4 Biological constraints and requirements

15.5 Security concerns for wireless implants

15.6 Wireless inductive powering and uni-directional data system for a MEMS drug pump

15.7 Suggested improvements and future generation device

15.8 Conclusion

15.9 Acknowledgment

Chapter 16: RF MEMS for automotive radar


16.1 Introduction

16.2 RF MEMS components for automotive radar

16.3 Examples of RF MEMS-based automotive radar front-end technology

16.4 Unconventional MEMS radar beam-steering technologies

16.5 Conclusion

Chapter 17: Telecommunications reliability monitoring using wireless MEMS


17.1 Introduction

17.2 Typical reliability issues in telecommunication systems

17.3 Reliability monitoring with wireless MEMS

17.4 Case study: multi-MEMS platform

17.5 Conclusion

17.6 Acknowledgements

Chapter 18: Optical MEMS for displays in portable systems


18.1 Introduction

18.2 MEMS-based direct-view displays

18.3 Handheld picoprojectors

18.4 Automobile head-up display

18.5 Eyewear displays

18.6 Conclusion



The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.

Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.

With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems.

Key Features

  • Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications
  • Discusses wireless techniques and applications of wireless MEMS, including biomedical applications
  • Describes monitoring structures and the environment with wireless MEMS


MEMS manufacturers; Scientists, engineers, professors, and researchers working on MEMS and wireless systems


No. of pages:
© Woodhead Publishing 2013
Woodhead Publishing
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In my opinion this is an excellent book for MEMS in mobile communications, Professor Hamed Al-Raweshidy, Director of the Wireless Networks and Communications Centre (WNCC), Brunel University, UK
An excellent introduction to the field for engineers and scientists; it identifies important capabilities and opportunities for MEMS in wireless sensing and communication., Professor Yogesh B. Gianchandani, University of Michigan, USA
This comprehensive handbook will be a valuable resource to practitioners in the field, as well as to users and potential users of MEMS technology in wireless and mobile., Professor Eric M. Yeatman, Imperial College London

Ratings and Reviews

About the Editors

Deepak Uttamchandani Editor

Deepak Uttamchandani is Professor of Microsystems Engineering at the University of Strathclyde, UK. Since the late 1980s he has been conducting research in the field of microtechnology including: techniques for the characterisation of micromechanical properties of materials; optically excited microresonator sensors; commercial-foundry-centred microfabrication of MEMS in polysilicon and silicon-on-insulator, MEMS design and radio-frequency (RF) MEMS. He has edited 2 books, guest-edited 2 journals and authored/co-authored around 200 publications. He has been a member of the UK EPSRC ranking panels (responsible for government funding of engineering research), was a member of the Basic Technology programme (org. by the UK government to find emerging technologies) and served on one of the UK Dept of Trade and Industry (DTI) Technology Programme panels in 2004.

Affiliations and Expertise

Professor of Microsystems Engineering, University of Strathclyde, UK