Description

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.

Readership

International scientific and instrumentation communities concerned with thin films, spectroscopic ellipsometry, optical measurement, proteomics (protein chip technology in genomics); theory and applications in thin films materials science including semiconductors.

Table of Contents

PART 1: THEORY OF ELLIPSOMETRY 1. Polarized Light and Ellipsometry Josef Humlfcek 1.1 A quick guide to ellipsometry 1.2 Maxwell and wave equations 1.3 Representations of polarization 1.4 Propagation of polarized light 1.5 Reflection and transmission of polarized light at planar interfaces 1.6 References 2. Optical Physics of Materials Robert W. Collins 2.1 Introduction 2.2 Propagation of light in solids 2.3 Classical theories of the optical properties of solids 2.4 Quantum mechanical theories of the optical properties of solids 2.5 Modeling the optical properties of solids 2.6 Overview and concluding remarks 2.7 References and bibliography 3. Data Analysis for Spectroscopic Ellipsometry Gerald E. Jellison, Jr. 3.1 Introduction 3.2 Ellipsometry parameters 3.3 Calculation of complex reflection coefficients 3.4 Models for dielectric functions 3.5 Fitting models to data 3.6 Determination of optical functions from spectroscopic ellipsometry data 3.7 Depolarization 3.8 Further reading and references PART 2: INSTRUMENTATION 4. Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer Harland G. Tompkins 4.1 General 4.2 The components 4.3 Ellipsometer component configurations 4.4 References 5. Rotating Polarizer and Analyzer Ellipsometry Robert W. Collins, Ilsin An, Chi Chen 5.1 Introduction 5.2 Comparison of ellipsometers 5.3 Instrumentation issues

Details

No. of pages:
886
Language:
English
Copyright:
© 2005
Published:
Imprint:
William Andrew
Electronic ISBN:
9780815517474
Print ISBN:
9780815514992

About the editors

About the authors