Handbook of Ellipsometry

Handbook of Ellipsometry

1st Edition - January 6, 2005

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  • Authors: Harland Tompkins, Eugene A Irene
  • eBook ISBN: 9780815517474

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Description

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.

Readership

International scientific and instrumentation communities concerned with thin films, spectroscopic ellipsometry, optical measurement, proteomics (protein chip technology in genomics); theory and applications in thin films materials science including semiconductors.

Table of Contents

  • PART 1: THEORY OF ELLIPSOMETRY
    1. Polarized Light and Ellipsometry
    Josef Humlfcek
    1.1 A quick guide to ellipsometry
    1.2 Maxwell and wave equations
    1.3 Representations of polarization
    1.4 Propagation of polarized light
    1.5 Reflection and transmission of polarized light at planar interfaces
    1.6 References
    2. Optical Physics of Materials
    Robert W. Collins
    2.1 Introduction
    2.2 Propagation of light in solids
    2.3 Classical theories of the optical properties of solids
    2.4 Quantum mechanical theories of the optical properties of solids
    2.5 Modeling the optical properties of solids
    2.6 Overview and concluding remarks
    2.7 References and bibliography
    3. Data Analysis for Spectroscopic Ellipsometry
    Gerald E. Jellison, Jr.
    3.1 Introduction
    3.2 Ellipsometry parameters
    3.3 Calculation of complex reflection coefficients
    3.4 Models for dielectric functions
    3.5 Fitting models to data
    3.6 Determination of optical functions from spectroscopic ellipsometry data
    3.7 Depolarization
    3.8 Further reading and references

    PART 2: INSTRUMENTATION
    4. Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
    Harland G. Tompkins
    4.1 General
    4.2 The components
    4.3 Ellipsometer component configurations
    4.4 References
    5. Rotating Polarizer and Analyzer Ellipsometry
    Robert W. Collins, Ilsin An, Chi Chen
    5.1 Introduction
    5.2 Comparison of ellipsometers
    5.3 Instrumentation issues
    5.4 Data reduction for the rotating polarizer and analyzer ellipsometers
    5.5 Precision considerations
    5.6 Calibration procedures
    5.7 Summary: recent and future directions
    6. Polarization Modulation Ellipsometry
    Gerald E. Jellison, Jr., Frank A. Modine
    6.1 Introduction
    6.2 The photoelastic modulator (PEM)
    6.3 Experimental configurations of polarization modulation ellipsometers
    6.4 Light intensity through a polarization modulation ellipsometer
    6.5 Waveform analysis
    6.6 Calibration procedures
    6.7 Errors
    6.8 Further reading and references
    7. Multichannel Ellipsometry
    Robert W. Collins, Ilsin An, Joungchel Lee, Juan A. Zapien
    7.1 Introduction
    7.2 Overview of instrumentation
    7.3 Rotating element designs
    7.4 Concluding remarks
    7.5 References

    PART 3: APPLICATIONS
    8. SiO2 Films
    Eugene A. Irene
    8.1 Introduction
    8.2 Historical perspectiveùprior to 1970
    8.3 Modern studiesùsince 1970
    8.4 Conclusions
    8.5 References
    9. Theory and Application of Generalized Ellipsometry
    Mathias Schubert
    9.1 Introduction
    9.2 The generalized ellipsometry concept
    9.3 Theory of generalized ellipsometry
    9.4 Special generalized ellipsometry solutions
    9.5 Strategies in generalized ellipsometry
    9.6 Generalized ellipsometry applications
    9.7 Conclusions
    9.8 Further reading and references

    PART 4: EMERGING AREAS
    10. VUV Ellipsometry
    James N. Hilfiker
    10.1 Introduction
    10.2 Historical review of short wavelength ellipsometry
    10.3 VUV ellipsometry today
    10.4 Importance of VUV ellipsometry
    10.5 Survey of applications
    10.6 Future of VUV ellipsometry
    10.7 Acknowledgments
    10.8 References
    11. Spectroscopic Infrared Ellipsometry
    Arnulf R÷seler
    11.1 Introduction
    11.2 Experimental tools
    11.3 Applications
    11.4 References
    12. Ellipsometry in Life Sciences
    Hans Arwin
    12.1 Introduction
    12.2 Historical background
    12.3 The interfaces under study
    12.4 From optics to biology
    12.5 Methodology for data evaluation
    12.6 Methodologyùexperimental
    12.7 Applications
    12.8 Outlook
    12.9 References

    Index

Product details

  • No. of pages: 886
  • Language: English
  • Copyright: © William Andrew 2005
  • Published: January 6, 2005
  • Imprint: William Andrew
  • eBook ISBN: 9780815517474

About the Authors

Harland Tompkins

Affiliations and Expertise

Independent consultant with ties to American Vacuum Society.

Eugene A Irene

Affiliations and Expertise

University of North Carolina, Chapel Hill, USA

About the Editors

Harland Tompkins

Affiliations and Expertise

Independent consultant with ties to American Vacuum Society.

Eugene A Irene

Affiliations and Expertise

University of North Carolina, Chapel Hill, USA

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