Description

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Key Features

  • Provides a basic introduction to measurement and instruments 
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Readership

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Table of Contents

Introduction to metrology for micro- and nanotechnology; Some basics of measurement;  Precision measurement instrumentation - some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A SI units of measurement and their realisation at NPL; Appendix B SI derived units

Details

No. of pages:
352
Language:
English
Copyright:
© 2010
Published:
Imprint:
William Andrew
Print ISBN:
9780080964546
Electronic ISBN:
9781437778328

About the editors

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati