
Ferroelectricity in Doped Hafnium Oxide
Materials, Properties and Devices
Description
Key Features
- Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices
- Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more
- Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face
Readership
Materials Scientists and Engineers, R&D in ferroelectric memory
Table of Contents
1. Fundamentals of Ferroelectric and piezoelectric properties
2. HfO2 processes
3. Dopant screening for optimization of the ferroelectric properties
4. Electrode screening for capacitor applications
5. Phase transition
6. Switching kinetics
7. Impact of oxygen vacancies
8. Epitaxial growth of ferroelectric HfO2
9. Thickness scaling Chapter
10. Simulation/Modelling
11. Structural characterization on a nanometer scale: PFM, TEM
12. Comparison to standard ferroelectric materials
13. FE HfO2 based devices
Product details
- No. of pages: 570
- Language: English
- Copyright: © Woodhead Publishing 2019
- Published: March 27, 2019
- Imprint: Woodhead Publishing
- eBook ISBN: 9780081024317
- Paperback ISBN: 9780081024300
About the Editors
Uwe Schroeder
Affiliations and Expertise
Cheol Hwang
Affiliations and Expertise
Hiroshi Funakubo
Affiliations and Expertise
Ratings and Reviews
Latest reviews
(Total rating for all reviews)
Mohit Sun Oct 17 2021
Second edition of book
It would be great if there is a separate chapter in second edition on ''Oxide channel transistors using ferroelectric Hafnium dioxide as gate insulator''. Since there are lots of new research articles related to this area and I am currently working on it.
Anuj P. Sat Jul 18 2020
Up gradation of book
You can add review of negative capacitance and NCFET using Hf-Z-rO as a Ferroelectric in the book . As i am currently working on negative capacitance and Hf-Zr-O is a great break through in this field.
Min H. Thu Jan 02 2020
It was really helpful. I
It was really helpful. I loved it.
MonicaAcuautla Mon Nov 25 2019
Ferroelectric in Doped Hafnia Oxide
This is a nice and full review of the topic. It is clear and well explained.