Fabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices

1st Edition - September 3, 2008

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  • Author: Behraad Bahreyni
  • Hardcover ISBN: 9780815515777
  • eBook ISBN: 9780815519713

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Description

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Key Features

  • Offers numerous academic and industrial examples of resonant MEMS
  • Provides an analytic model of device behaviour
  • Explains two-port systems in detail
  • Devotes ample space to excitation and signal detection methods
  • Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Readership

Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design

Table of Contents

  • Microfabrication
    Actuation mechanisms
    Sensing techniques
    Modeling
    Damping mechanisms
    Interfacing
    Noise
    Packaging
    Survey of applications

Product details

  • No. of pages: 250
  • Language: English
  • Copyright: © William Andrew 2008
  • Published: September 3, 2008
  • Imprint: William Andrew
  • Hardcover ISBN: 9780815515777
  • eBook ISBN: 9780815519713

About the Author

Behraad Bahreyni

Affiliations and Expertise

Cambridge University, UK

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