Description

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Key Features

* Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Readership

Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.

Details

No. of pages:
250
Language:
English
Copyright:
© 2008
Published:
Imprint:
William Andrew
Print ISBN:
9780815515777
Electronic ISBN:
9780080947570

About the editor

Behraad Bahreyni

Affiliations and Expertise

Cambridge University, UK