Epitaxial Growth

1st Edition - May 28, 1975
Editor: J. W. Matthews
Language: English
eBook ISBN:
9 7 8 - 1 - 4 8 3 2 - 7 1 8 1 - 1

Epitaxial Growth Part B is the second part of a collection of review articles that describe various aspects of the growth of single-crystal films on single-crystal substrates. The… Read more

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Epitaxial Growth Part B is the second part of a collection of review articles that describe various aspects of the growth of single-crystal films on single-crystal substrates. The topics discussed are the nucleation of thin films, the structure of the interface between film and substrate, and the generation of defects during film growth. The methods used to prepare and examine thin films are described and a list of the overgrowth-substrate combinations studied so far is given.

List of Contributors

Preface

Contents of Part A

Chapter 4. Nucleation of Thin Films

I. Introduction: The Mechanisms of Nucleation and Growth

II. Regimes of Condensation

III. Quantitative Description of the Nucleation Process

IV. Solutions of the Rate Equations

V. Effects of Imperfections

VI. Experimental Examples

VII. Nucleation and Epitaxy

References

Chapter 5. Defects in Epitaxial Deposits

I. Introduction

II. Nucleation and Growth of Epitaxial Films

III. Dislocations

IV. Stacking Faults

V. Twinning

VI. Multiply Twinned Particles

VII. Defects in Alloys and Compounds

VIII. Conclusions

References

Chapter 6. Energy of Interfaces between Crystals

I. Introduction

II. Thin Films

III. Semi-infinite Overgrowths

IV. Misfit Dislocation Energy in Overgrowths of Finite Thickness

V. Stability of Growing Epitaxial Crystals

VI. Small Epitaxial Islands

References

Chapter 7. Energy of Interfaces between Crystals: An AB Initio Approach

I. Introduction

II. The Interface Problem from First Principles

III. Symmetry Considerations and Coincidence Lattices

IV. Interface Energy as a Variational Problem

V. The Coincidence Boundary in Reciprocal Space

VI. The Interface Problem in Reciprocal Space

VII. The Elastic Problem

VIII. The Variational Problem in Reciprocal Space

IX. The Interaction Potential

X. Calculations with a Model Potential

XI. An Ab Initio Potential for Aluminum

XII. Surface Entropy and Free Energy

XIII. Relation to Epitaxial Growth

References

Chapter 8. Coherent Interfaces and Misfit Dislocations

I. Introduction

II. Predictions

III. Observations of Coherency Strains

IV. Observations of Misfit Dislocations

V. The Generation of Misfit Dislocations

VI. Misfit Dislocations and the Alignment of Deposits

VII. Behavior of Misfit Dislocations during Diffusion

VIII. Role of Misfit Dislocations in Diffusion

References

Chapter 9. List of Epitaxial Systems

I. Introduction

II. Classification and Nomenclature

III. Index of Overgrowth (Deposit of Film) Materials

IV. List of Epitaxial Systems

Index