Characterization in Silicon Processing

Characterization in Silicon Processing

1st Edition - September 24, 1993

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  • Editor: Yale Strausser
  • eBook ISBN: 9780080523422

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This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems.

Table of Contents

  • Application of materials characterization techniques to silicon epitaxial growth; polysilicon conductors; Silicades; Aluminium and/or copper conductors; Tungsten based conductors; Diffusion barriers.

Product details

  • No. of pages: 240
  • Language: English
  • Copyright: © Newnes 2013
  • Published: September 24, 1993
  • Imprint: Newnes
  • eBook ISBN: 9780080523422

About the Editor

Yale Strausser

Affiliations and Expertise

Surface Science Laboratories, Sunnyvale, CA, USA

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