Description

Applications of Piezoelectric Quartz Crystal Microbalances deals with the theory, design, artifacts, and varied applications of the piezoelectric quartz crystal microbalance. Applications of microbalances range from thin film deposition process control to simultaneous measurement of mass and temperature, analytical chemistry, and space system contamination studies. Stress effects in microbalances are also considered. Comprised of 10 chapters, this volume begins with a historical background and overview of applications of piezoelectric quartz crystal microbalances, followed by an analysis of the theory and practice of microbalances. The role of acoustic impedance in a quartz crystal microbalance and design considerations for a microbalance are given emphasis. Subsequent chapters focus on applications of microbalances in thin film deposition process control; simultaneous measurement of mass and temperature; surface science and analytical chemistry; plasma-assisted etching and space system contamination studies; and aerosol mass measurement. This monograph will be of interest to students and practitioners of physics, chemistry, and materials science.

Table of Contents


Preface

Chapter 1. Introduction, History, and Overview of Applications of Piezoelectric Quartz Crystal Microbalances

I. Introduction

II. History of Piezoelectric Quartz Crystal Microbalances

A. Piezoelectric Effect

B. Frequency Control with Quartz Crystals

C. Relating Changes in Mass to Frequency Measurements

III. Overview of Applications of Piezoelectric Quartz Crystal Microbalances

A. Chapter 2, Theory and Practice of the Quartz Crystal Microbalance

B. Chapter 3, Applications of Quartz Crystal Microbalances for Thin Film Deposition Process Control

C. Chapter 4, Stress Effects in Quartz Crystal Microbalances

D. Chapter 5, Simultaneous Measurement of Mass and Temperature Using Quartz Crystal Microbalances

E. Chapter 6, Applications of Quartz Crystal Microbalances in Surface Science

F. Chapter 7, Quartz Crystal Microbalances for Plasma-Assisted Etching Studies and Applications

G. Chapter 8, Applications of Quartz Crystal Microbalances in Analytical Chemistry

H. Chapter 9, Application of the Quartz Crystal Microbalance to Space System Contamination Studies

I. Chapter 10, Applications of Quartz Crystal Microbalances in Aerosol Mass Measurement

References

Chapter 2. Theory and Practice of the Quartz Crystal Microbalance

I. Introduction

II. Piezoelectric Quartz Crystal Resonators

A. Modes of Vibration

B. Crystallographic Orientation

C. Temperature Dependence of the Resonant Frequency

D. Equivalent Circuit

III. Theory of the Piezoelectric Quartz Crystal Microbalance

A. A Linear Frequency-to-Mass Equation for Small Mass Loads

Details

Language:
English
Copyright:
© 1984
Published:
Imprint:
North Holland
Electronic ISBN:
9780444596482
Print ISBN:
9780444422774

About the editors

C. Lu

Dr. Cong Lu is currently an associate Professor in the School of Mechatronics Engineering, University of Electronic Science and Technology of China. Dr. Lu’s research interests include collaborative design and assembly, concurrent Engineering, and CAD/CAM. Dr. Lu has published many research papers in the reputable international journals, such as ASME Journal of Computing and Information Science in Engineering, IMechE Journal of Engineering Manufacture, International Journal of Production Research.

Reviews

@qu:The editors have, together with nine other authors, collected all that is worth knowing about the history, theory, operation and applications of the QCM methods... @source:Talanta