Analytical Techniques for Thin Films

Analytical Techniques for Thin Films

Treatise on Materials Science and Technology, Vol. 27

1st Edition - March 28, 1988

Write a review

  • Editors: K. N. Tu, R. Rosenberg
  • eBook ISBN: 9781483218311

Purchase options

Purchase options
DRM-free (PDF)
Sales tax will be calculated at check-out

Institutional Subscription

Free Global Shipping
No minimum order


Treatise on Materials Science and Technology, Volume 27: Analytical Techniques for Thin Films covers a set of analytical techniques developed for thin films and interfaces, all based on scattering and excitation phenomena and theories. The book discusses photon beam and X-ray techniques; electron beam techniques; and ion beam techniques. Materials scientists, materials engineers, chemical engineers, and physicists will find the book invaluable.

Table of Contents

  • Contributors


    Part I. Introduction

    1 Submicron Structure and Microanalysis

    I. Introduction

    II. Submicron Structure

    III. Microanalysis

    IV. Chapter Synopses

    Part II. Photon Beam and X-Ray Techniques

    2 Synchronotron Radiation Photoemission Studies of Interfaces

    I. Statement of Purpose

    II. Introduction

    III. Synchronotron Radiation Photoemission

    IV. Case Studies

    V. Concluding Remarks


    3 Esca

    I. Introduction

    II. Instrumentation and Experimental Considerations

    III. Surface Sensitivity

    IV. Quantitative Analysis

    V. Depth Profiling

    VI. Chemical Shifts and Solid State Screening

    VII. Surface and Interface Segregation

    VIII. Line Widths and Line Shapes

    IX. Auger Spectra

    X. Valence Electron Spectra



    4 Modern Developments in Soft X-Ray Imaging

    I. Introduction

    II. Soft X-Ray Sources

    III. Resolution

    IV. Potential Applications in Materials Science


    5 X-Ray Diffraction Analysis of Strains and Stresses in Thin Films

    I. Introduction

    II. Strain-Stress Relations

    III. X-Ray Diffraction Techniques

    IV. Summary

    Appendix A. Tensor Transformations and Matrix Notation

    Appendix B. Relations between Stiffnesses and Compliances


    6 X-Ray Diffraction Analysis of Diffusion in Thin Films

    I. Introduction

    II. Diffusion Equations

    III. X-Ray Diffraction Analysis

    IV. Summary


    Part III. Electron Beam Techniques

    7 Cross-Sectional Transmission Electron Microscopy of Electronic and Photonic Devices

    I. Epoxy-Embedding Technique

    II. TEM Cross Section Sample Preparation Technique for III-V Compound Semiconductor Device Materials by Chemical Thinning

    III. Pre-ion-Milling Etch and Pre-ion-Milling Drill Techniques

    IV. Glass Sealing Cross-Section TEM Sample Preparation

    V. Feature Enhancement

    VI. TEM Test Pattern

    VII. Future Trends and Summary


    8 High-Resolution Transmission Electron Microscopy of Surfaces and Interfaces

    I. Introduction

    II. Lattice Imaging

    III. Diffraction Contrast Techniques

    IV. Surfaces

    V. Current Developments


    9 Scanning Transmission Electron Microscopy

    I. Introduction

    II. Stem Electron Optics

    III. Common Analytical Techniques

    IV. Energy-Filtered Imaging

    V. High-Resolution Energy-Loss Studies

    VI. Property-Dependent Techniques

    VII. Computer Interaction with the Stem

    VIII. Conclusions


    Part IV. Ion Beam Techniques

    10 Rutherford Backscattering Spectrometry on Thin Solid Films


    II.Basic Concepts of Rutherford Backscattering Spectrometry

    III.Elemental Composition and Depth Profiling: Applications and Examples

    IV.Microbeam Applications

    V.Concepts of Channeling

    VI.Epitaxial Thin-Film Applications


    VIII.Surface-Structure Studies


    11 The Atomic Structure and Atomic Layer Compositional Analysis of Thin Solid Films Using the Time-of-Flight Atom-probe Field Ion Microscopy


    II.Method of Absolute Composition Depth Profiling in the Atom-probe


    IV.Applications to Surface-layer Analysis

    V.Concluding Remarks



Product details

  • No. of pages: 506
  • Language: English
  • Copyright: © Academic Press 1988
  • Published: March 28, 1988
  • Imprint: Academic Press
  • eBook ISBN: 9781483218311

About the Editors

K. N. Tu

R. Rosenberg

Ratings and Reviews

Write a review

There are currently no reviews for "Analytical Techniques for Thin Films"