Analytical Techniques for Thin Films

Analytical Techniques for Thin Films

Treatise on Materials Science and Technology, Vol. 27

1st Edition - March 28, 1988

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  • Editors: K. N. Tu, R. Rosenberg
  • eBook ISBN: 9781483218311

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Description

Treatise on Materials Science and Technology, Volume 27: Analytical Techniques for Thin Films covers a set of analytical techniques developed for thin films and interfaces, all based on scattering and excitation phenomena and theories. The book discusses photon beam and X-ray techniques; electron beam techniques; and ion beam techniques. Materials scientists, materials engineers, chemical engineers, and physicists will find the book invaluable.

Table of Contents


  • Contributors

    Preface

    Part I. Introduction

    1 Submicron Structure and Microanalysis

    I. Introduction

    II. Submicron Structure

    III. Microanalysis

    IV. Chapter Synopses

    Part II. Photon Beam and X-Ray Techniques

    2 Synchronotron Radiation Photoemission Studies of Interfaces

    I. Statement of Purpose

    II. Introduction

    III. Synchronotron Radiation Photoemission

    IV. Case Studies

    V. Concluding Remarks

    Notes

    3 Esca

    I. Introduction

    II. Instrumentation and Experimental Considerations

    III. Surface Sensitivity

    IV. Quantitative Analysis

    V. Depth Profiling

    VI. Chemical Shifts and Solid State Screening

    VII. Surface and Interface Segregation

    VIII. Line Widths and Line Shapes

    IX. Auger Spectra

    X. Valence Electron Spectra

    Summary

    References

    4 Modern Developments in Soft X-Ray Imaging

    I. Introduction

    II. Soft X-Ray Sources

    III. Resolution

    IV. Potential Applications in Materials Science

    References

    5 X-Ray Diffraction Analysis of Strains and Stresses in Thin Films

    I. Introduction

    II. Strain-Stress Relations

    III. X-Ray Diffraction Techniques

    IV. Summary

    Appendix A. Tensor Transformations and Matrix Notation

    Appendix B. Relations between Stiffnesses and Compliances

    References

    6 X-Ray Diffraction Analysis of Diffusion in Thin Films

    I. Introduction

    II. Diffusion Equations

    III. X-Ray Diffraction Analysis

    IV. Summary

    References

    Part III. Electron Beam Techniques

    7 Cross-Sectional Transmission Electron Microscopy of Electronic and Photonic Devices

    I. Epoxy-Embedding Technique

    II. TEM Cross Section Sample Preparation Technique for III-V Compound Semiconductor Device Materials by Chemical Thinning

    III. Pre-ion-Milling Etch and Pre-ion-Milling Drill Techniques

    IV. Glass Sealing Cross-Section TEM Sample Preparation

    V. Feature Enhancement

    VI. TEM Test Pattern

    VII. Future Trends and Summary

    References

    8 High-Resolution Transmission Electron Microscopy of Surfaces and Interfaces

    I. Introduction

    II. Lattice Imaging

    III. Diffraction Contrast Techniques

    IV. Surfaces

    V. Current Developments

    References

    9 Scanning Transmission Electron Microscopy

    I. Introduction

    II. Stem Electron Optics

    III. Common Analytical Techniques

    IV. Energy-Filtered Imaging

    V. High-Resolution Energy-Loss Studies

    VI. Property-Dependent Techniques

    VII. Computer Interaction with the Stem

    VIII. Conclusions

    References

    Part IV. Ion Beam Techniques

    10 Rutherford Backscattering Spectrometry on Thin Solid Films

    I.Introduction

    II.Basic Concepts of Rutherford Backscattering Spectrometry

    III.Elemental Composition and Depth Profiling: Applications and Examples

    IV.Microbeam Applications

    V.Concepts of Channeling

    VI.Epitaxial Thin-Film Applications

    VII.Superlattices

    VIII.Surface-Structure Studies

    References

    11 The Atomic Structure and Atomic Layer Compositional Analysis of Thin Solid Films Using the Time-of-Flight Atom-probe Field Ion Microscopy

    I.Introduction

    II.Method of Absolute Composition Depth Profiling in the Atom-probe

    III.Instrumentation

    IV.Applications to Surface-layer Analysis

    V.Concluding Remarks

    References

    Index


Product details

  • No. of pages: 506
  • Language: English
  • Copyright: © Academic Press 1988
  • Published: March 28, 1988
  • Imprint: Academic Press
  • eBook ISBN: 9781483218311

About the Editors

K. N. Tu

R. Rosenberg

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