Silicides for VLSI Applications book cover

Silicides for VLSI Applications

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It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.


Published: March 1983

Imprint: Academic Press

ISBN: 978-0-12-511220-8


  • Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.


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