Silicides for VLSI Applications book cover

Silicides for VLSI Applications

To order this title, and for more information, click here

Audience
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.

,

Published: March 1983

Imprint: Academic Press

ISBN: 978-0-12-511220-8

Contents

  • Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.

Advertisement

advert image