Plasma Deposition, Treatment, and Etching of Polymers
The Treatment and Etching of Polymers
- Riccardo d'Agostino, Centro di Studio per la Chimica dei Plasmi, CNR, University of Bari
- Daniel Flamm, AT&T Bell Laboratories, Murray Hill, New Jersey
- Orlando Auciello, Microelectronics Center of North Carolina and North Carolina University
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Scientists, technicians, and engineers in industry, academia, and at national laboratories; graduate students of electrical engineering and materials science.