Optical Diagnostics for Thin Film Processing
- Irving Herman, Ph.D., Massachusetts Institute of Technology, Columbia University, Dept. of Applied Physics
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control.Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field.
This book is a good introduction for novices in the field and a valuable resource handbook for those with experience. The primary audience includes: academic and industrial researchers, scientists, technicians and engineers inthin film processing, spectroscopy, optical diagnostics, electrical engineering, materials science, and condensed matter physics. The book is also useful for optical scientists, applied physicists, chemists, and materials scientists. In addition, it can serve as a teaching text for graduate courses, society-sponsored short courses (such as AVS, MRS, SPIE, and ECS meetings), and on-site training courses at industrial fabrication facilities. It will especially be of interest to those in the United States,Western Europe, and Japan.