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MICROELECTRONIC ENGINEERING
Micro and Nano Fabrication


Special issues & Supplements
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Volume
(Guest) editor
(56 special issues and supplements)
(Guest)editorsVolume & journal title
Vol. 69, no. 2-4:
NGCM 2002
( 559 pages )
Vol. 82, no. 3-4:
Proceedings of the ninth european workshop on materials for advanced metallization 2005
( 511 pp )
Vol. 84, no. 11:
IMaterials for Advanced Metallization 2007, 16th European Workshop on ?Materials for Advanced Metallization 2007?
( 328 )
H. Ahmed, J.R.A. Cleaver, G.A.C. Jones et al.
Vol. 11:
Microcircuit Engineering 89
( xx + 708 pages )
T. Ando, C. Hamaguchi, S. Namba
Vol. 47, no. 1-4:
NPMS 98 - New Phenomena in Mesoscopic Structures
( 452 pages )
T. Ando, C. Hamaguchi
Vol. 63, no. 1-3:
NMPS 2001, New Phenomena in Mesoscopic Structures
( 318 pages )
P. Balk, J.J.M. de Nijs
Vol. 22:
INFOS'93
( 436 pages )
J. Bausells, G. Abadal, F. Perez-Murano
Vol. 84, No. 5-8:
Proceedings of the 32nd International Conference on Micro- and Nano-Engineering
( 1155 pages )
S.P. Beaumont, C.D.W. Wilkinson
Vol. 35:
Micro– and Nano– Engineering 96
( 598 pages )
A. Birolini, M. Ciappa, E. Wolfgang
Vol. 24:
Electron and Optical Beam Testing of Electronic Devices
( 456 pages )
G. Bomchil, D. Célier, R. Madar et al.
Vols. 37/38:
MAM'97
( 612 pages )
J. Brugger, J. Gobrecht, H. Rothuizen et al.
Vol. 67-68:
MNE 2002
( 990 pages )
S. Cristoloveanu, N. Gillemot
Vol. 28:
INFOS'95
( 508 pages )
S. Cristoloveanu, J. Boussey
Vol. 39:
MIGAS
( 286 pages )
G. Declerck, K. de Meyer
Vol. 10, no. 3/4:
Semiconductor Manufacturing Science
( ii + 172 pages )
G. Declerck, L. Van den Hove, F. Coopmans
Vol. 13:
Microcircuit Engineering 90
( xviii + 574 pages )
R. De Keersmaecker
Vol. 34, no. 1/2:
Jessi Basic &Long–Term Research Advanced CMOS Cluster Workshop, Brussels, Belgium, 29–30 March 1995
( 142 pages )
G. de Santi, G. Ottaviani
Vol. 55, no.1-4:
MAM 2000
( 418 pages )
A. Dimoulas, P. Normand
Vol. 84, no. 9-10:
INFOS 2007-10-22
( 596 )
S. Fan, Y. Han, Z. L. Wang et al.
Vol. 66, no 1-4:
IUMRS-ICEM2002
( 952 pages )
O. Fortagne, D. P. Kern, U. Behringer
Vol. 57-58:
MNE 2000
( 1,066 pages )
H. Fußstetter, H. Richter, M. Umeno
Vol. 56, no.1-2:
Proceedings of the E-MRS IUMRS ICEM 2000 Meeting
( 232 pages )
M. Gentili
Vol. 34, no. 3/4:
Microfabrication of Differactive Optical Elements
( 128 pages )
M. Gentili, E. Di Fabrizio, G. Meneghini
Vol. 53, no. 1-4:
MNE '99
( 712 pages )
T. Gessner, J. Torres, G. Crean
Vol. 33:
Advanced Materials for Interconnections
( 464 pages )
G. Ghibaudo, J. Boussey
Vol. 40, no. 3/4:
MIGAS
( 198 pages )
M. Hatzakis, E. Gogolides
Vols. 41/42:
Micro– and Nano– Engineering 97
( 668 pages )
M. Henini
Vols. 43/44:
LDSD'97
( 780 pages )
M. Henini
Vols. 51-52:
LDSD '99
( 744 pages )
M. Ilegems, M. Dutoit
Vol. 15:
Solid State Device Research 91
( xxiv + 698 pages )
O. Joubert, J. Perrocheau, S. Tedesco
Vol. 61-62:
MNE 2001
( 1,138 pages )
A. Kristensen, A. Boisen
Vol. 85 no. 5-6:
Proceedings of the Micro– and Nano–Engineering 2007 Conference – MNE 2007
( 750 )
E. Kubalek, E. Wolfgang
Vol. 12:
Electron and Optical Beam Testing of Integrated Circuits
( xii + 446 pages )
P.K. Larsen, G.J.M. Dormans
Vol. 29:
EMIF 1
( 354 pages )
H.W. Lehmann, U. Staufer, P. Vettiger
Vol. 27:
Micro– and Nano– Engineering 94
( 582 pages )
H. Loeschner
Vol. 83, no. 4- 9:
Proceedings of the International Conference on Micro and Nano-Engineering MNE 2005
( 1277 pages )
H.E. Maes, R.P. Mertens, R.J. Van Overstraeten
Vol. 19:
Solid State Device Research 92
( xxxviii + 932 pages )
M. Melgara, E. Wolfgang, B. Courtois et al.
Vol. 16:
Electron and Optical Beam Testing of Integrated Circuits
( xii + 534 pages )
Y.I. Nissim, G.W. Rubloff, A. Katz
Vol. 25, no. 2/4:
Integrated Processing for Micro and Optoelectronics
( 292 pages )
F. Paschke, W. Fallmann, H. Löschner
Vol. 9:
Microcircuit Engineering 88
( xviii + 654 pages )
J. Perrocheau
Vol. 30:
Micro– and Nano– Engineering 95
( 646 pages )
S. Radelaar, J. Romijn, E. van der Drift
Vol. 23:
International Conference on Microfabrication
( 512 pages )
G. Reimbold, J. Boussey
Vol. 49, no. 1-2:
Migas International Summer school on Advanced Microelectronics-Grenoble
( 204 pages )
Rusli, C-C. Tin, H. Matsunami et al.
Vol. 83, no. 1:
The Symposium K Proceedings of the 3rd International Conference on Materials for Advanced Technologies (ICMAT 2005)
( 192 pages )
H. Ryssel, D. Stephani
Vol. 21:
Microcircuit Engineering 92
( 516 pages )
E. Sangiorgi, L. Selmi
Vol. 59, no. 1-4:
INFOS 2001
( 526 pages )
D. Schmitz, H. Jürgensen
Vol. 18, no. 1/2:
MOVPE for Opto– and Microelectronics
( viii + 206 pages )
M. Schulz, R. Brendel
Vol. 48, no. 1-4:
Insulating films on semiconductors
( 450 pages )
O. Thomas, H. Dallaporta, P. Gas
Vol. 70, no. 2-4:
MAM 2003
( 445 pages )
A. Tucciarone, A. Paoletti, P. Paroli
Vol. 17:
Microcircuit Engineering 91
( xviii + 582 pages )
L. Van den hove, K. Ronse, M. Van Rossum
Vol. 46, no. 1-4:
Micro– and Nano– Engineering 98
( 530 pages )
A. Vantomme, M. de Potter, M. Baklanov et al.
Vol. 50, no. 1-4:
Proceedings of the Third European Workshop on Materials for Advanced Metallization Ostende, Belgium, March 7-10, 1999
( 566 pages )
P. Vettiger, U. Staufer, D.P. Kern
Vol. 32:
Nanotechnology
( 426 pages )
E. Wolfgang, B. Courtois, L.J. Balk
Vol. 31:
Electron and Optical Beam Testing of Electronic Devices
( 444 pages )
W. Zapka
Vol. 20, no. 1/2:
Laser Processing in Microelectronics
( 190 pages )
S.-L. Zhang, M. Õstling
Vol. 60, no 1-2:
MAM 2001
( 294 pages )
Microelectronic Engineering
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