The aim of Microelectronic Engineering is to bring together in one publication the results of international work in the rapidly
expanding field of integrated microelectronics.
Microelectronic Engineering is an archival, peer-reviewed journal. It
publishes full research papers, accelerated publications (letters), short notes and review articles.
The journal ... click here for full Aims & Scope
The aim of Microelectronic Engineering is to bring together in one publication the results of international work in the rapidly
expanding field of integrated microelectronics.
Microelectronic Engineering is an archival, peer-reviewed journal. It
publishes full research papers, accelerated publications (letters), short notes and review articles.
The journal is dedicated to
advanced engineering methods for micro- and nanofabrication of electronic devices, circuits and systems for electronics, electromechanics,
and bioelectronics.
This includes following topics:
1. Nanolithography and Nanopatterning
•optical lithography
•EUV lithography and masks
•charged particle based lithography and patterning
•nanoimprint lithography techniques
and templates
•maskless lithography
•emerging nanopatterning methods
•limits of nanolithography and nanopatterning
2. Pattern Transfer
•ion technology
•plasma processing: etching, nanotexturing, bonding
3.
Materials
•metallization and barrier materials
•silicon on insulators
•dielectrics (low K and high
K)
•interconnects
•new resist materials
•nanomaterials for device fabrication
•block copolymers
•polymers and flexible substrates
4. Nanometrology, Inspection and Testing
•electron beam testers
•laser probes
•signal and image processing
•nanometrology
•AFM, Scanning probe measurements
5. Advanced Processing and Nanofabrication
•process integration
•three dimensional integration
•rapid
thermal processing
•process modelling and simulation
•equipment modelling
•laser assisted processing
•top-down / bottom-up (self - assembly) nanofabrication
6. Advanced Devices
•nanometer devices for electronics
and optoelectronics
•dimension-sensitive device properties
•advanced MOS devices
•vacuum nanoelectronics
•organic and molecular electronics
•mesoscopic devices
•micro- & nanofluidics
•other miniaturized
devices for biology, chemistry, medicine
7. Advanced fabrication and characterization for heterogeneous micro- and nanosystems
•electro-mechanical systems (MEMS, NEMS)
•optical systems
•fluidic systems
•biosystems
•lab-on-a-chip
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Editor-in-Chief, Europe: Contact the Editor
M. van Rossum
Proceedings MNE 2008
Proceedings MNE 2007
Proceedings MNE 2006
Proceedings MNE 2005
For older MNE Proceedings, please click
here
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We are always interested in receiving suggestions on the journal. Also, if you have publication proposals for books or new journals in the field or suggestions for any other kind of cooperation, please do not hesitate to contact us. Miss Rupal Malde, Publishing Editor, E-mail:
r.malde@elsevier.com.
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