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| HANDBOOK OF PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING
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To order this title, and for more information, click here
Second Edition
By
Donald M. Mattox, Society of Vacuum Coaters (Technical Director)
Description
This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the
characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing.
The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can
meet the required performance specifications, with additional information to support the original material.
The book covers
subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the
widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely
relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which
are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship
between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience
with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only
avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain
points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find
discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader
can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.
The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already
in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest
to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing
of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided
in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with
the English language.
Audience
Engineers, including surface engineering personnel, technicians, and other plant personnel in process industries such as semiconductors
and microelectronics. Especially informative for those new to the field.
| Bibliographic details |
Hardbound, 0 pages, publication date: MAY-2010
ISBN-13: 978-0-8155-2037-5
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
GBP 125
USD 249
EUR 185
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Last update: 5 Sep 2009
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