Elsevier Homepage

Books & journals
- Books
- By title
- By author
- By subject
- By publication date
- Book types
- Major reference works
- Multi volumes
- Desk copies
- Journals
- By title
- By subject
- By editor
- Journal related
- Dispatch dates
- Subscription price list
- Combined subscription & full sets of journals
Online tools
- Content resources & search tools
- SciVerse Hub
- SciVerse ScienceDirect
- eClips Consult
- MD Consult
- Mosby’s Nursing Consult
- All Clinics Online
- The Pink Sheet
- PharmaPendium
- Geofacets
- illumin8
- Reaxys
- Scirus
- Elsevier Biofuel
- Bibliographic databases
- Embase
- Biobase
- Mosby's Index
- SciVerse Scopus
- Engineering Village
- Interactive applications
- Brain Navigator
- SciVerse Applications
- Interact Elsevier
- Procedures Consult
- Performance & planning
- SciVal Suite
- Evolve Hub
- MEDai Pinpoint Suite
- ElsevierAdvantage.com
- CPMRC
- View products by industry >>
- View all Elsevier products >>
Authors, editors & reviewers
- Journal authors
- Journal authors’ home
- How to format and submit an article
- Check status of submitted article
- Check status of accepted article
- Book authors
- Book authors’ home
- How to format and submit a book
- Editors
- Editors’ home
- Production process
- Find reviewers
- Journal marketing
- Measuring journal performance
- Reviewers
- Reviewers’ home
- Reviewers’ guidelines
- Reviewers’ workshops
- Reviewer feedback programme
About Elsevier
- General
- At a glance
- Mission
- Management
- Financial
- Principles & policies
- Experts
- Corporate responsibility
- History
- Honors
- Careers
- Press
- Elsevier in the news
- Flash research news
- Image bank
- Newsroom
- Media contacts
- Press releases
- Events
- Conferences
- Exhibitions
Help
- Books & journals customer support
- FAQ
- Contact us
- Author, editor & reviewer support
- FAQ
- Contact us
- Contact information for
- Advertisers & sponsors
- Corporations
- Health practitioners
- Health providers/payers
- Media
- Societies
Store
- Products
- Article Choice
- Books
- Databases
- Journals
- Solutions
- Author Products
- Subjects
- Health Sciences
- Life Sciences
- Physical Sciences
- Social Sciences
- Industries
- Chemicals
- Electronic and Electrical Equipment
- Energy
- Materials and Mechanical
- Pharmaceutical and Biotechnology
- Special offers
- Grand opening sale
- 20% off the top 20 books!

Browse Books > Materials Science > General Materials Science > Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology

Principles, Deposition, Film Modification and Synthesis

Authors

Author Information and Services

Submit Your Book Proposal

Handbook of Ion Beam Processing Technology on ScienceDirect(Opens new window)

Hardbound, 456 Pages
Published: DEC-1989
ISBN 10: 0-8155-1199-X
ISBN 13: 978-0-8155-1199-1
Imprint: WILLIAM ANDREW

Actions

By
Jerome J. Cuomo
Stephen M. Haber
Harold R. Kaufman

Description
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

Audience:
Engineers, technicians, and plant personnel in the semiconductor and related industries.

Last update: 6 Nov 2011