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Browse Books > Materials Science > General Materials Science > Handbook of Plasma Processing Technology

Handbook of Plasma Processing Technology

Fundamental, Etching, Deposition and Surface Interactions

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Handbook of Plasma Processing Technology on ScienceDirect(Opens new window)

Hardbound, 546 Pages
Published: DEC-1990
ISBN 10: 0-8155-1220-1
ISBN 13: 978-0-8155-1220-2
Imprint: WILLIAM ANDREW

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By
Stephen M. Rossnagel
William D. Westwood
Jerome J. Haber

Description
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Audience:
Scientists, engineers, graduate students in the fields of semiconductors, thin films, energy, environment, automotive, medical and food packaging.

Last update: 6 Nov 2011