Edited by
Gary F. McGuire, MCNC, Electronic Technologies Division, Research Triangle Park, NC
By
Gary F. McGuire, MCNC, Electronic Technologies Division, Research Triangle Park, NC
Description
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI)
and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be
difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this
problem by bringing together "snapshots" of the various aspects of the technology.
Audience:
Materials scientists and engineers in the semiconductor field.
