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| HANDBOOK OF SPUTTER DEPOSITION TECHNOLOGY
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Principles, Technology and Applications
To order this title, and for more information, click here
By
Kiyotaka Wasa, Matsushita Electric, Ltd. and Yokohama City University, Japan
Shigeru Haber
Description
A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade.
Cathode
sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings.
High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric
materials are other applications.
Audience
Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.
Contents
Thin Film Materials and Devices
Thin Film Processes
Sputtering Phenomena
Sputtering Systems
Deposition of Compound Thin Films
Microfabrication by Sputtering
Future Directions
| Bibliographic details |
Hardbound, 316 pages, publication date: DEC-1992
ISBN-13: 978-0-8155-1280-6
ISBN-10: 0-8155-1280-5
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
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USD 147
EUR 104.95
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Last update: 3 Oct 2009
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