By
Kiyotaka Wasa, Matsushita Electric, Ltd. and Yokohama City University, Japan
Shigeru Hayakawa
Description
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.
Cathode
sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings.
High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric
materials are other applications.
Audience:
Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.
