By
Veikko Lindroos
Markku Tilli
Ari Lehto
Teruaki Motooka
Description
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis
on current and future applications.
Key topics covered include:
- Silicon as MEMS material
- Material properties and measurement techniques
- Analytical methods used in materials characterization
- Modeling
in MEMS
- Measuring MEMS
- Micromachining technologies in MEMS
- Encapsulation of MEMS components
- Emerging
process technologies, including ALD and porous silicon
Written by 73 world class MEMS contributors from
around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling
the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive
reference for the industrial R&D and academic communities.
-
Veikko Lindroos is Professor of Physical Metallurgy
and Materials Science at Helsinki University of Technology, Finland.
-
Markku Tilli is Senior Vice President of Research
at Okmetic, Vantaa, Finland.
-
Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.
-
Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.
Included in series
Micro and Nano Technologies
Audience:
Engineers, researchers and scientists in sensor manufacturing.
