By
Regina Luttge
Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of
concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication,
and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron
feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition;
(waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental
aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional
polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
Included in series
Micro and Nano Technologies
Audience:
Engineers in industry and at schools / universities; polytechnical students.
