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By
Regina Luttge
Included in series
Micro and Nano Technologies,
Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of
concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication,
and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron
feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition;
(waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental
aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional
polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
Audience
Engineers in industry and at schools / universities; polytechnical students.
Contents
1. Introduction
reasons for miniaturisation
micro and nanofabrication through the ages (microcomponents and assembly versus monolithic
approach)
overview of industrial fields of application
2. Microsystems technology
philosophy of micro/nanofabrication for integrated
circuit industry
top-down approach to sub-micron feature manufacture
thin film deposition
processing of semiconductor materials
(doping, oxidation, RTA, metallisation, SOI, etc.)
processing of waveguide materials
processing of plastic materials
packaging
and interconnects
the stress issue: thin film residual stress, stress issues in packaging and interconnection
economical aspects
of semiconductor manufacture
environmental aspects of semiconductor manufacture
3. Nanotechnology
top-down or bottom up
nanostructures
fabricated with beams
nano imprinting methods
manufacturing nanoparticles
health aspects of nanoparticles
how to analyse nanofeatures?
connecting nano to micro to macro
quo vadis?
4. Microsystems for Information Technology
data recording (camera, microphone)
data
storage (memories, CD's)
data (tele) communication
computing
displays (beamers, LCD, TFT)
5. Micro and nanomechanical sensors and
actuators
application fields
materials and methods, general overview
silicon as a mechanical material
silicon micromachining:
process tolerances and large-scale manufacturability
testing and assembly
integration and interconnection
temperature monitoring
and control
reliability issues
case studies: pressure and acceleration sensors, resonators / rf-MEMS, scanning probes (AFM etc.)
smart materials: what is a "smart material," overview of materials for actuation and detection
fabrication and properties of piezoelectric
microstructures
fabrication and properties of magnetic microstructure
other smart materials and their manufacturability, e.g. functional
polymers
micro- and nanotransducer systems
6. Sensors for chemical and medical applications
application fields
materials and methods
surface modification methods
spotting techniques
nanostructures and nanoparticles
testing, assembly and interfacing; reliability
issues
7. Microfluidic systems
mini-, micro- and nanofluidics: what are they and why are they of interest?
application fields
physics
of fluids in micro- and nanochannels
silicon, glass or plastics?
temperature monitoring and control
integration and interconnection
testing and assembly; reliability issues
case studies: transdermal medical systems, micropumps, microvalves, inkjets, DNA-analysis,
lab-on-a-chip, micro-cooling
8. Micro and nanotechnology for sustainable energy
solar cells based on semiconductors
future developments
in solar energy: nanoparticles
microbatteries and micro fuel cells
microreactors for sustainable energy
reliability issues
alternative
energy sources based on micro- and nanotechnology
| Bibliographic details |
Hardbound, 600 pages, publication date: OCT-2010
ISBN-13: 978-0-8155-1582-1
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
USD 220
GBP 132.99
EUR 156.95
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Last update: 3 Oct 2009
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