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| LASER MICROFABRICATION
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Thin Film Processes and Lithography
To order this title, and for more information, click here
Edited By
Daniel Ehrlich, MIT--Lincoln Laboratory
Jeffrey Tsao, Sandia National Laboratories
Description
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the
past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation
cross sections, thermochemical constants, etc.) for the active researcher.
Audience
Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.
Contents
Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals.
T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and
Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger,
D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J.
Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental
Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.
| Bibliographic details |
Hardbound, 587 pages, publication date: MAY-1989
ISBN-13: 978-0-12-233430-6
ISBN-10: 0-12-233430-2
Imprint: ACADEMIC PRESS
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| Price and Ordering |
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EUR 180
USD 265
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Last update: 19 Feb 2010
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