Handbook of Thin Film Deposition

Handbook of Thin Film Deposition on ScienceDirect(Opens new window)
Hardbound, 416 Pages
Published: JUN-2012
ISBN 13: 978-1-4377-7873-1
Imprint: WILLIAM ANDREW


Audience:
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries.


 
Last update: 13 Apr 2012