Fabrication & Design of Resonant Microdevices
Fabrication & Design of Resonant Microdevices on ScienceDirect(Opens new window)
Hardbound, 250 Pages
Published: SEP-2008
ISBN 13: 978-0-8155-1577-7
Imprint: WILLIAM ANDREW

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By
Behraad Bahreyni, Cambridge University, UK

Included in series
Micro and Nano Technologies

Audience:
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.


 
Last update: 6 Nov 2011