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FABRICATION & DESIGN OF RESONANT MICRODEVICES
Fabrication & Design of Resonant Microdevices
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By
Behraad Bahreyni, Cambridge University, UK

Included in series
Micro and Nano Technologies,

Audience
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.

Contents
Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications

Bibliographic details
Hardbound, 250 pages, publication date: SEP-2008
ISBN-13: 978-0-8155-1577-7
Imprint: WILLIAM ANDREW

Price and Ordering
Price:
GBP 100
EUR 111
USD 165
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Last update: 20 Feb 2010
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