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| FABRICATION & DESIGN OF RESONANT MICRODEVICES
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To order this title, and for more information, click here
By
Behraad Bahreyni, Cambridge University, UK
Included in series
Micro and Nano Technologies,
Audience
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.
Contents
Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications
| Bibliographic details |
Hardbound, 250 pages, publication date: SEP-2008
ISBN-13: 978-0-8155-1577-7
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
GBP 100
EUR 111
USD 165
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Last update: 20 Feb 2010
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