By
Shyam Muraka
Edited By
Moshe Eizenberg
Ashok Sinha
Description
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the
materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials
whilst considering these challenges.
Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications
of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including
those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.
Audience:
Materials Scientists, researchers and professionals with semiconductor technologies.
