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| INTERLAYER DIELECTRICS FOR SEMICONDUCTOR TECHNOLOGIES, 1
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To order this title, and for more information, click here
By
Shyam Muraka
Edited By
Moshe Eizenberg
Ashok Sinha
Description
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the
materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials
whilst considering these challenges.
Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications
of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including
those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.
Audience
Materials Scientists, researchers and professionals with semiconductor technologies.
Contents
Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics,
Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic
Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability,
Future Trends in Silicon Technologies
| Bibliographic details |
Hardbound, 464 pages, publication date: OCT-2003
ISBN-13: 978-0-12-511221-5
ISBN-10: 0-12-511221-1
Imprint: ACADEMIC PRESS
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| Price and Ordering |
Price:
USD 270
GBP 173
EUR 203.95
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Last update: 4 Sep 2009
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