Edited by
T. Fukuda, Nagoya University, Department of Microsystem Engineering, Furo-cho, Chikusa-ku, Nagoya 464-01, Aichi, Japan
Wolfgang Menz, Johann Wolfgang Goethe-Universität, Institut für Sozialforschung
Frankfurt, Germany
Description
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction
to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics
and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication,
basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic
principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance
and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers
energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section
nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical
systems.
Included in series
Handbook of Sensors and Actuators
