Microelectronic Engineering

Microelectronic Engineering

  • Volume 16
  • Issue 16
  • ISSN 0167-9317
  • SCImago Journal Rank (SJR): 0.553
  • Source Normalized Impact per Paper (SNIP): 0.915
  • Impact Factor: 2.523
  • Five Year Impact Factor: 2.08
Editor-in-chief: Gogolides

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Next planned ship date: Oct 27, 2021

Description



Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.

The journal addresses the following topics and considers mostly experimental work, or theoretical / simulation work directly linked and supporting experiments in the fields:
  • Microelectronics processing & materials (Lithography, Self-assembly, Plasma Processing, Metallization, 3D Integration, Related Materials?.)
  • Micro-/Nano-engineering / fabrication / technology / manufacturing
  • Nanoelectronic and photonic devices and their fabrication
  • Microsystems, microdevices (e.g., sensors and nanoenergy devices) and their fabrication
  • Microfluidics, life science devices /sensors, as well as integrated Lab-on-a-chip and their fabrication


In detail the topics covered are as follows:

1. Nanolithography and Nanopatterning:
  • Optical Lithography
  • Electron Optical Methods and Systems
  • X-ray Optical Methods and Systems
  • Resists
  • Limits of Nanolithography
  • Nanoimprint Lithography
  • EUV Lithography and Masks
  • Charged Particle Based Lithography and Patterning
  • Nanoimprint Lithography Techniques and Templates
  • Maskless Lithography
  • Emerging Nanopatterning Methods
  • Limits of Nanopatterning


2. Pattern Transfer
  • Ion Technology
  • Plasma Processing
  • Transfer of Pattern with Other Methods
  • Plasma Etching
  • Plasma Nanotechnology
  • Plasma / beam Nanopatterning
  • Plasma Surface Modification of Devices
  • Wet transfer methods


3. Materials
  • Metallization and Barrier Materials
  • Silicon on Insulators
  • Dielectrics (low K and high K)
  • Interconnects
  • New Resist Materials
  • Nanomaterials for Device Fabrication
  • Block Copolymers
  • Polymers and Flexible Substrates
  • Layered (2D) Materials and Related Transferring Techniques


4. Nanometrology, Inspection and Testing
  • Electron Beam Testers
  • Laser Probes
  • Signal and Image Processing
  • Nanometrology
  • AFM and Scanning Probe Measurements


5. Advanced Processing and Nanofabrication
  • Process Integration
  • Three Dimensional Integration
  • Other / Emerging Manufacturing and Fabrication Techniques
  • 3D Printing
  • Rapid Thermal Processing
  • Process Modelling and Simulation
  • Equipment Modelling
  • Laser Assisted Processing
  • Top-Down / Bottom-Up (Self-Assembly) Nanofabrication
  • Growth, Planarization, Cleaning Techniques for Devices
    • Plasma deposition
    • MBE
    • Other growth techniques
    • Planarization and cleaning techniques


6. Advanced Nanoelectronic, Photonic, Sensing, Energy Harvesting, and Fluidic Devices
  • Nanoelectronic, Optoelectronic and Photonic Devices
    • Memristive devices for neuromorphic computing
    • Steep slope or fast switching devices
    • Photonic devices
    • Optoelectronic devices
  • Dimension-sensitive Device Properties
  • Memory Devices
    • Magnetic and spintronic devices
  • Advanced MOS Devices
  • Vacuum Nanoelectronics
  • Flexible / Organic / Molecular Electronics
    • Organic and molecular electronics
    • Flexible electronics
    • Wearable electronics
    • Paper electronics
    • Printed electronics
  • Microdevices, Energy Harvesting Devices and Sensors
    • Physical sensors and actuators
    • Energy harvesting devices


7. Chemical, biological, bioelectronic and fluidic devices. Heterogeneous Micro-Nano and Bio Systems
  • Electro-Mechanical Systems (MEMS, NEMS)
  • Power MEMS
  • RF MEMS
  • MOEMS
  • Magnetic MEMS
  • Optical and Photonic Systems


  • Micro and Nano Fluidic Devices
  • Pumping / valving devices
  • Mixing devices
  • Separation devices
  • Microreactors
  • Sample preparation devices
  • Fluidic interfaces and integration


  • Miniaturized Devices for Biology, Chemistry, Medicine
  • Biosensors
  • Chemical sensors
  • Biomimetic properties incorporated into devices
  • Bioelectronic devices
  • Micro / nano / bio interface and interconnection devices


  • Lab-on-a-chip, bioMEMS, microTAS
  • DNA / protein chips
  • Cell on chip
  • Organ on chip
  • Biomimetic properties incorporated into systems
  • Bioanalytic, diagnostic systems
  • Microseparation, pretreatment systems
  • On-chip detection systems
  • Environmental and food monitoring systems
  • Microreactors


Manuscripts of 5 (five) types are considered:
  • Review Articles that inform readers of the latest research and advances in nanoelectronics, nanofabrication, micro-nano systems, and applications (authors should e-mail editors with a review proposal and outline before submitting)
  • Accelerated Publications (Letters) that feature exciting research breakthroughs in the field
  • Regular original research papers
  • Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
  • News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work

Product details

  • SCImago Journal Rank (SJR): 0.553
  • Source Normalized Impact per Paper (SNIP): 0.915
  • Impact Factor: 2.523
  • Five Year Impact Factor: 2.08
  • ISSN: 0167-9317
  • Issues: 16
  • Volume: 16
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Publication schedule

Issue volumeIssue yearPlanned ship dateActual ship date
235C2021Nov 25, 2020Nov 26, 2020
236C2021Dec 16, 2020Dec 15, 2020
237C2021Jan 25, 2021Jan 19, 2021
238C2021Feb 26, 2021Feb 17, 2021
239-240C2021Mar 25, 2021Mar 25, 2021
241C2021Apr 27, 2021Apr 15, 2021
242-243C2021May 28, 2021May 24, 2021
244-246C2021Jun 22, 2021Jun 17, 2021
247C2021Aug 26, 2021Aug 19, 2021
248C2021Sep 16, 2021Sep 10, 2021
249C2021Oct 27, 2021
250C2021Oct 29, 2021
251C2022Nov 19, 2021
252C2022Dec 10, 2021
253C2022Jan 12, 2022
254C2022Feb 02, 2022
255C2022Feb 21, 2022
256C2022Mar 10, 2022
257C2022Apr 04, 2022
258C2022Apr 29, 2022
259C2022May 20, 2022
260C2022Jun 06, 2022
261C2022Jun 20, 2022
262C2022Aug 16, 2022
263C2022Sep 01, 2022
264C2022Sep 23, 2022
265C2022Oct 20, 2022
266C2022Nov 01, 2022
267C2023Nov 22, 2022
268C2023Dec 15, 2022