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Non-Crystalline Films for Device Structures

Product Type: Book
Edition: 1st Edition
Volume: 29
First Published: 2001
Print: 978-0-12-533029-9
eBook: 978-0-08-054295-9

Frontiers of Thin Film Technology

Product Type: Book
Edition: 1st Edition
Volume: 28
First Published: 2000
Print: 978-0-12-533028-2
eBook: 978-0-08-054294-2

PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Product Type: Book
Edition: 1st Edition
Volume: 26
First Published: 1998
Print: 978-0-12-391176-6
eBook: 978-0-08-054292-8