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Non-Crystalline Films for Device Structures

Product Type: Book

Edition: 1

Volume: 29

First Published: 2001

eBook: 978-0-08-054295-9

Frontiers of Thin Film Technology

Product Type: Book

Edition: 1

Volume: 28

First Published: 2000

eBook: 978-0-08-054294-2

PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Product Type: Book

Edition: 1

Volume: 26

First Published: 1998

eBook: 978-0-08-054292-8

Hardcover: 978-0-12-533026-8