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Handbook of Silicon Based MEMS Materials and Technologies

Product Type: Book

Edition: 2

First Published: 2015

eBook: 978-0-323-31223-3

Hardcover: 978-0-323-29965-7

Handbook of Silicon Based MEMS Materials and Technologies

Product Type: Book

Edition: 1

First Published: 2000

eBook: 978-0-8155-1988-1