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Plasma Etching Processes for CMOS Devices Realization

Product Type: Book

Edition: 1

First Published: 2017

eBook: 978-0-08-101196-6

Hardcover: 978-1-78548-096-6

Plasma Etching Processes for Interconnect Realization in VLSI

Product Type: Book

Edition: 1

First Published: 2015

eBook: 978-0-08-100590-3

Hardcover: 978-1-78548-015-7