VLSI Electronics - 1st Edition - ISBN: 9780122341052, 9781483217727

VLSI Electronics, Volume 5

1st Edition

Microstructure Science

Editors: Norman G. Einspruch
eBook ISBN: 9781483217727
Imprint: Academic Press
Published Date: 28th September 1982
Page Count: 416
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Table of Contents


List of Contributors


Preface


Chapter 1 Automation for VLSI Manufacture


I. Introduction


II. VLSI Manufacturing Technology


III. Automation for VLSI Manufacture


IV. Summary


References


Chapter 2 Silicon Material Properties for VLSI Circuitry


I. Introduction


II. Fabrication of Silicon Material and VLSI Circuits: A Summary


III. Silicon Material Phenomena Important for VLSI Circuitry


IV. Electrical Effects of Point Defects and Crystal Strain on VLSI Circuitry


V. Historical Perspective on the Evolution of Silicon Material Technology


VI. Conclusion; Recommendations


References


Chapter 3 High-Performance Computer Packaging and the Thin-Film Multichip Module


I. Introduction—The Trend for High-Performance Computer Packaging


II. The Multilayer Ceramic Module for LSI Chips


III. Challenges for Designing Future High-Performance Multichip Modules


IV. Thin-Film Interconnection Lines


V. The Delta-I Problem and On-Module Capacitor


VI. Thin-Film Line Fabrication and the Defect Problem


VII. Conclusion—The Thin-Film Module as a High-Performance Package


References


Chapter 4 Nanometer-Scale Fabrication Techniques


I. Introduction


II. Resist Processes and Resolution Limits


III. Exposure and Patterning Techniques


IV. Three-Dimensional Techniques


V. Conclusions


References


Chapter 5 High-Density CCD Memories


I. Introduction


II. Early Use of Electron-Beam Technology to Fabricate CCDs


III. MOS RAM versus CCD


IV. Technology Components


V. CCD Memory Structure


VI. Two-Phase Cell


VII. Channel


Description

VLSI Electronics: Microstructure Science, Volume 5 considers trends for the future of very large scale integration (VLSI) electronics and the scientific base that supports its development.

This book discusses the automation for VLSI manufacture, silicon material properties for VLSI circuitry, and high-performance computer packaging and thin-film multichip module. The nanometer-scale fabrication techniques, high-density CCD memories, and solid-state infrared imaging are also elaborated. This text likewise covers the impact of microelectronics upon radar systems and quantum-mechanical limitations on device performance.

This volume is a good source for scientists and engineers who wish to become familiar with VLSI electronics, device designers concerned with the fundamental character of and limitations to device performance, systems architects who will be charged with tying VLSI circuits together, and engineers conducting work on the utilization of VLSI circuits in specific areas of application.


Details

No. of pages:
416
Language:
English
Copyright:
© Academic Press 1982
Published:
Imprint:
Academic Press
eBook ISBN:
9781483217727

Ratings and Reviews


About the Editors

Norman G. Einspruch Editor