VLSI Electronics - 1st Edition - ISBN: 9780122341045, 9781483217710

VLSI Electronics, Volume 4

1st Edition

Microstructure Science

Editors: Norman G. Einspruch
eBook ISBN: 9781483217710
Imprint: Academic Press
Published Date: 28th May 1982
Page Count: 392
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Table of Contents

List of Contributors


Chapter 1 Silicon-on-Insulator for VLSI and VHSIC

I. Introduction

II. Application of SOI to VLSI/VHSI Circuits

III. The Various SOI Technologies

IV. Conclusions


Chapter 2 X-Ray Lithography

I. Introduction

II. Spectral Region of Interest

III. X-Ray Proximity Printing

IV. Sources

V. Masks

VI. Resists

VII. Mask Alignment

VIII. Exposure Systems

IX. Applications

X. Conclusion


Chapter 3 Transient Response of Electron Transport in GaAs Using the Monte Carlo Method

I. Introduction

II. Monte Carlo Method

III. Transient Response Calculations

IV. Conclusion


Chapter 4 Technology and Manufacturing of High-Density Magnetic-Bubble Memories

I. Introduction

II. Critical Developments Necessary for High-Density Bubble Technology

III. Magnetic-Bubble Technology

IV. Magnetic-Bubble Memory Manufacturing

V. Future Trends in Bubble Devices

VI. Summary


Chapter 5 Metallic Superlattices

I. Introduction

II. Preparation Techniques

III. Structural and Physical Properties

IV. Summary


Chapter 6 The Challenge of Education for VLSI

I. The Situation

II. The Solutions

III. Conclusion


Chapter 7 The Impact of VLSI on Medical Signal Processing

I. Introduction

II. Biological Signals

III. Methodologies for Computer Analysis of Biological Signals

IV. Implementation of Signal-A


VLSI Electronics: Microstructure Science, Volume 4 reviews trends for the future of very large scale integration (VLSI) electronics and the scientific base that supports its development.

This book discusses the silicon-on-insulator for VLSI and VHSIC, X-ray lithography, and transient response of electron transport in GaAs using the Monte Carlo method. The technology and manufacturing of high-density magnetic-bubble memories, metallic superlattices, challenge of education for VLSI, and impact of VLSI on medical signal processing are also elaborated. This text likewise covers the impact of VLSI technology on the design of intelligent measurement instruments and systems.

This volume is valuable to scientists and engineers who wish to become familiar with VLSI electronics, device designers concerned with the fundamental character of and limitations to device performance, systems architects who will be charged with tying VLSI circuits together, and engineers conducting work on the utilization of VLSI circuits in specific areas of application.


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© Academic Press 1982
Academic Press
eBook ISBN:

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About the Editors

Norman G. Einspruch Editor