VLSI Electronics Microstructure Science - 1st Edition - ISBN: 9780122341076, 9781483217741

VLSI Electronics Microstructure Science, Volume 7

1st Edition

Editors: Norman G. Einspruch
eBook ISBN: 9781483217741
Imprint: Academic Press
Published Date: 1st December 1983
Page Count: 414
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Table of Contents

List of Contributors


Chapter 1 Advanced Manufacturing Equipment for VLSI Lithography

I. Introduction

II. The Nature of the Lithographic Process

III. Optical Lithography

IV. Electron-Beam Microlithography

V. X-Ray Lithography

VI. Hybrid Lithography

VII. Updated Position

VIII. Other Considerations

IX. Future Microlithographic Systems and Their Relation to the Factory of the Future

X. Summary and Conclusion


Chapter 2 Scaled MOS and Bipolar Technologies for VLSI

I. Introduction

II. Generic Processes for MOS and Bipolar VLSI

III. MOS Scaling and Technology Implementation

IV. Bipolar Scaling and Technology Implementation

V. Conclusion


Chapter 3 Laser Direct Writing for VLSI

I. Introduction

II. Instrumentation for Laser Direct Writing

III. Laser Etching

IV. Laser Deposition

V. Laser Doping

VI. Applications

VII. Summary and Future Directions


Chapter 4 Ultrathin-Gate Dielectric Processes for VLSI Applications

I. Introduction

II. Growth of Thin Oxides

III. Characteristics and Characterization of Thin Oxides

IV. Process-Related Issues

V. Thin Oxides Related to Devices

VI. Case for Alternative Dielectrics


Chapter 5 Limits to Improvement of Silicon Integrated Circuits

List of Symbols

List of Acronyms

I. Prefatory Remarks

II. Introduction

III. Physical Limits

IV. Technological Limits

V. Complexity Limits

VI. Summary


VLSI Electronics: Microstructure Science, Volume 7 presents a comprehensive exposition and assessment of the developments and trends in VLSI (Very Large Scale Integration) electronics.

This treatise covers subjects that range from microscopic aspects of materials behavior and device performance to the comprehension of VLSI in systems applications. Each chapter is prepared by a recognized authority. The topics contained in this volume include a basic introduction to the application of superconductivity in high-speed digital systems; the expected impact of VLSI technology on the implementation of AI (artificial intelligence); the limits to improvement of silicon integrated circuits; and the various spontaneous noise sources in VLSI circuits and their effect on circuit operation.

Scientists, engineers, researchers, device designers, and systems architects will find the book very useful.


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© Academic Press 1983
Academic Press
eBook ISBN:

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About the Editors

Norman G. Einspruch Editor