Ultrahigh Vacuum Practice covers topics about components suitable for ultrahigh vacuum applications, their theory of operation, their assembly and use, and their performance and calibration.
The book starts by discussing the fundamentals of vacuum science and technology. The text then describes the physical properties and methods of preparing the materials for ultrahigh vacuum and the various pumps and their performance and application to ultrahigh vacuum systems. The mechanism and performance of the various ultrahigh vacuum gauges and the problem of gauge calibration at low pressures, as well as the accuracy that can be expected are discussed as well. Partial pressure measurements, ultrahigh vacuum components, and liquid nitrogen replenisher are also considered. The book tackles the system requirements and applications, as well as methods for detecting leak.
Users or potential users of ultrahigh vacuum equipment and expert vacuum engineers will find the book useful.
Foreword Preface Chapter 1 Fundamentals of Vacuum Science and Technology 1.1 Properties of Vacuum 1.2 The Kinetic Theory Model of a Vacuum 1.3 Flow of Gas Through Vacuum Systems 1.4 Pumping of Vacuum Systems 1.5 Sources of Gas Within the Vacuum System 1.6 References Chapter 2 Materials for Ultrahigh Vacuum 2.1 Criteria for Ultrahigh Vacuum Materials 2.2 Glass 2.3 Metals 2.4 Ceramics 2.5 Other Materials 2.6 Fabricating Techniques 2.7 References Chapter 3 Pumps 3.1 Background 3.2 Diffusion Pumps 3.3 Turbomolecular Pumps 3.4 Sorption Pumps 3.5 Cryogenic Pumps 3.6 Sublimation and Getter Pumps 3.7 Ion Pumps 3.8 Choice of Pumps 3.9 References Chapter 4 Total Pressure Measurements 4.1 Introduction 4.2 Ionization Gauges 4.3 Momentum Transfer Gauges 4.4 Gauge Calibration 4.5 References Chapter 5 Partial Pressure Measurements 5.1 The Need for Partial Pressure Gauges 5.2 Gauge Parameters 5.3 Ion Sources 5.4 Static Spectrometers 5.5 Dynamic Spectrometers 5.6 Ion Detection 5.7 Calibration and Performance 5.8 References Chapter 6 Ultrahigh Vacuum Line Components 6.1 Scope 6.2 Demountable Seals 6.3 Mechanical Feed-Throughs and Dynamic Seals 6.4 Valves 6.5 Other Vacuum Line Components 6.6 Liquid Nitrogen Replenisher 6.7 References Chapter 7 Systems and Applications 7.1 Introduction 7.2 Systems Requirements 7.3 Basic Pumping Considerations 7.4 Approaches to System Design 7.5 Applications 7.6 References Chapter 8 Leak Detection 8.1 Basic Techniques 8.2 Performance Requirements 8.3 Leak Detecting With an Ion Gauge 8.4 Leak Detecting With an Ion Pump 8.5 The Halogen Leak Detector 8.6 The Mass Spectr
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- © Butterworth-Heinemann 1985
- 21st May 1985
- eBook ISBN: