Ultrahigh Vacuum Practice

ForewordPrefaceChapter 1 Fundamentals of Vacuum Science and Technology 1.1 Properties of Vacuum 1.2 The Kinetic Theory Model of a Vacuum 1.3 Flow of Gas Through Vacuum Systems 1.4 Pumping of Vacuum Systems 1.5 Sources of Gas Within the Vacuum System 1.6 References Chapter 2 Materials for Ultrahigh Vacuum 2.1 Criteria for Ultrahigh Vacuum Materials 2.2 Glass 2.3 Metals 2.4 Ceramics 2.5 Other Materials 2.6 Fabricating Techniques 2.7 References Chapter 3 Pumps 3.1 Background 3.2 Diffusion Pumps 3.3 Turbomolecular Pumps 3.4 Sorption Pumps 3.5 Cryogenic Pumps 3.6 Sublimation and Getter Pumps 3.7 Ion Pumps 3.8 Choice of Pumps 3.9 References Chapter 4 Total Pressure Measurements 4.1 Introduction 4.2 Ionization Gauges 4.3 Momentum Transfer Gauges 4.4 Gauge Calibration 4.5 References Chapter 5 Partial Pressure Measurements 5.1 The Need for Partial Pressure Gauges 5.2 Gauge Parameters 5.3 Ion Sources 5.4 Static Spectrometers 5.5 Dynamic Spectrometers 5.6 Ion Detection 5.7 Calibration and Performance 5.8 References Chapter 6 Ultrahigh Vacuum Line Components 6.1 Scope 6.2 Demountable Seals 6.3 Mechanical Feed-Throughs and Dynamic Seals 6.4 Valves 6.5 Other Vacuum Line Components 6.6 Liquid Nitrogen Replenisher 6.7 References Chapter 7 Systems and Applications 7.1 Introduction 7.2 Systems Requirements 7.3 Basic Pumping Considerations 7.4 Approaches to System Design 7.5 Applications 7.6 References Chapter 8 Leak Detection 8.1 Basic Techniques 8.2 Performance Requirements 8.3 Leak Detecting With an Ion Gauge 8.4 Leak Detecting With an Ion Pump 8.5 The Halogen Leak Detector 8.6 The Mass Spectrometer Leak Detector 8.7 Calibration of Mass Spectrometer Leak Detectors 8.8 References Appendix 1 Derivation of Kinetic Theory Equations A1.1 Pressure A1.2 Velocity Distribution and Mean Velocity A1.3 Rate at Which Molecules Are Incident on a Surface A1.4 Mean Free Path Appendix 2 Vapor Pressure Curves of the Elements Appendix 3 Conversion Tables for Vacuum Quantities Index