Total Pressure Measurements in Vacuum Technology

Total Pressure Measurements in Vacuum Technology

1st Edition - September 11, 1985

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  • Author: A. Berman
  • eBook ISBN: 9781483273792

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Description

Total Pressure Measurements in Vacuum Technology focuses on the measurement of low total pressure in hostile environments or in the presence of magnetic fields. This book emphasizes the general processes and problems involved in measurement techniques and physical principles on which vacuum gauges operate, rather than on the detailed description of the gauges. The design and techniques involved in the use of special instruments that determine “pressure” or gas density, such as pressure converters or radioactive gauges, are also described. This publication is mainly intended for graduate students and research scientists who have a good general background in physics and engineering.

Table of Contents


  • Preface

    Acknowledgments

    List of Symbols

    Chapter 1. Units and Terminology in Vacuum Technology

    1.1 Pressure Units in Different Systems

    1.2 The Logarithmic Representation of Pressure

    1.3 Throughput and Conductance in the SI System

    1.4 Terminology and Standardization in Vacuum Technology

    References

    Chapter 2. Basic Concepts of Pressure Measurement

    2.1 The Rarefied Environment

    2.2 The Pressure Concept

    2.3 Influence of the Rarefied Environment on the Measuring Process

    2.4 Methods of Pressure Measurement

    2.5 The Process of Pressure Measurement

    References

    Chapter 3. Pressure Standards

    3.1 Classification of Pressure Standards

    3.2 Precision Liquid-Column Manometers

    3.3 The Compression Manometer—McLeod Gauge

    3.4 Pressure Generators

    3.5 Accuracy of Primary Standards

    3.6 The Conventional Triode

    3.7 The Capacitance Manometer

    3.8 The Spinning-Rotor Viscosity Gauge

    References

    Chapter 4. Gauges for Low-Pressure Measurement

    4.1 Classes of Instruments

    4.2 Gauges Measuring the Force Effect of Gas

    4.3 Gauges Measuring Gas Kinetic Effects

    4.4 Gauges Measuring Phenomena Produced by Charged Particles Crossing the Gas

    4.5 The Brownian Motion Gauge

    4.6 Range of Pressures Covered by Vacuum Gauges

    References

    Chapter 5. Methods for Vacuum Gauge Calibration

    5.1 General Considerations

    5.2 The Main Components of a Calibration System

    5.3 General Procedures for Calibration

    5.4 The Static Method

    5.5 The Dynamic Method

    5.6 Other Methods for Calibration in Ultrahigh Vacuum

    5.7 The Measurement of Gas Throughput

    5.8 The Measurement of Conductance to Free Molecular Flow

    5.9 Dissociation Equilibrium Pressure Method

    References

    Chapter 6. Calibration of Vacuum Gauges for Different Gases

    6.1 Calibration Techniques

    6.2 Calibration with Water Vapor

    6.3 Calibration with Hydrogen Isotopes

    6.4 Calibration with Reactive Gases

    References

    Chapter 7. Performance Determination of Hot-Cathode Ionization Gauges

    7.1 Characteristics Defining Performance

    7.2 Determination of Pressure Linearity with Time

    7.3 Sensitivity Determination

    7.4 Determination of Residual Currents

    7.5 Pumping Speed and Gas Release Determination

    References

    Chapter 8. Pressure Measurement in Confined Environments

    8.1 Physical Principles

    8.2 Continuously Pumped Vessels

    8.3 Sealed-off Vessels

    References

    Index

Product details

  • No. of pages: 412
  • Language: English
  • Copyright: © Academic Press 1985
  • Published: September 11, 1985
  • Imprint: Academic Press
  • eBook ISBN: 9781483273792

About the Author

A. Berman

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