Solid State Chemical Sensors - 1st Edition - ISBN: 9780123802101, 9780323141017

Solid State Chemical Sensors

1st Edition

Editors: Jiri Janata
eBook ISBN: 9780323141017
Imprint: Academic Press
Published Date: 27th June 1985
Page Count: 222
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Solid State Chemical Sensors reviews the basic chemical and physical principles involved in the construction and operation of solid state sensors. A major portion of the book is devoted to explanation of the basic mechanism of operation and the many actual and potential applications of field effect transistors for gas and solution sensing. This text is comprised of four chapters; the first of which describes the basics of device fabrication. Emphasis is placed on the physical description of semiconductor devices with catalytic metal gates, along with their drawbacks and their promise. The behavior of hydrogen in the Pd-SiO2 system is also considered, and some applications of hydrogen-sensitive transistors, such as smoke detection and biochemical reaction monitoring, are described. The second chapter focuses on chemically sensitive field effect transistors and their thermodynamics, while the third chapter explains the general fabrication procedure for solid state chemical sensors. The final chapter introduces the reader to piezoelectric and pyroelectric chemical sensors, paying particular attention to the sensor nature of piezoelectricity, the piezoelectric gravimetric sensor, and pyroelectric gas analysis. This book is intended to assist electrical engineers in understanding the chemistry involved in the construction and operation of solid state sensors and to educate chemists in solid state science.

Table of Contents

List of Contributors


1. Gas-Sensitive Metal Gate Semiconductor Devices

I. Introduction

II. MOS Device Physics

III. Palladium Gate MOS Devices

IV. Schottky Barrier Devices

V. Properties of the Catalytic Metal

VI. The Si-SiO2 System, Properties of Relevance to Gas Sensors

VII. Applications

VIII. Conclusions


2. Chemically Sensitive Field Effect Transistors

I. General Theory

II. Thermodynamics of ISFETs

III. Dynamic Characteristics

IV. Measuring Systems

V. Special CHEMFETs

VI. Conclusions


3. Fabrication of Solid State Chemical Sensors

I. Introduction

II. General Fabrication Procedure

III. Some Particulars of CHEMFET Design and Fabrication

IV. Encapsulation

Appendix: Metal Gate CHEMFET Fabrication Run Sheet


4. An Introduction to Piezoelectric and Pyroelectric Chemical Sensors

I. Introduction

II. Piezoelectric and Pyroelectric Sensors





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© Academic Press 1985
Academic Press
eBook ISBN:

About the Editor

Jiri Janata

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