Smart Sensors and MEMS

Smart Sensors and MEMS

Intelligent Sensing Devices and Microsystems for Industrial Applications

2nd Edition - February 27, 2018

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  • Editors: S Nihtianov, A. Luque
  • eBook ISBN: 9780081020562
  • Paperback ISBN: 9780081020555

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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.

Key Features

  • Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors
  • Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS
  • Presents the only book to discuss both smart sensors and MEMS for industrial applications


Academics in the fields of electronics and sensor technologies, Materials scientists and Electrical engineers working in the microelectronics, sensors, and micromechanics industry

Table of Contents

  • 1. What makes sensor devices and microsystems 'intelligent' or 'smart'?
    2. Interfacing sensors to microcontrollers: a direct approach
    3. Temperature Sensors
    4. Capacitive sensors for displacement measurement in the sub-nanometer range
    5. Integrated inductive displacement sensors for harsh industrial environments
    6. Magnetic Sensors
    7. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range
    8. Integrated polarization analyzing CMOS image sensors for detection and signal processing
    9. Advanced interfaces for resistive sensors
    10. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications
    11. Advanced optical incremental sensors: encoders and interferometers
    12. Microfabrication technologies used for creating smart devices for industrial applications
    13. Microactuators: design and technology
    14. Microreaction Chambers
    15. Dynamic behavior of smart MEMS in industrial applications
    16. MEMS integrating motion and displacement sensors
    17. MEMS print heads for industrial printing
    18. Photovoltaic and fuel cells in power MEMS for smart energy management
    19. Radio frequency (RF)-MEMS for smart communication microsystems
    20. Smart acoustic sensor array (SASA) system for real-time sound processing applications

Product details

  • No. of pages: 604
  • Language: English
  • Copyright: © Woodhead Publishing 2018
  • Published: February 27, 2018
  • Imprint: Woodhead Publishing
  • eBook ISBN: 9780081020562
  • Paperback ISBN: 9780081020555

About the Editors

S Nihtianov

Stoyan Nihtianov (M’93-SM’98) received his M.Sc. and Ph.D. degrees in electronics from the Technical University in Sofia, Bulgaria in 1980 and 1987. From 1987 till 1995 he was part of the Dept. of Electronics, Technical University - Sofia, where he was an associate professor involved in research and teaching on analogue circuits and smart sensor systems. Dr. Nihtianov is a member of the technical program committees of: International Conference on Industrial Technology (ICIT), International Symposium on Industrial Electronics (ISIE), International conference “Electronics” (Bulgaria). He is an AdCom member and serves as a chair of the technical committee on MEMS@Nanotechnology of the Industrial Electronics society. He is also an associate editor of the IEEE Sensors Journal, and serves as an officer “Industrial relations and conferences” of the BeNeLux section of IEEE.

Affiliations and Expertise

Electronics Instrumentation Lab, Delft University of Technology, The Netherlands

A. Luque

Antonio Luque received the M.Sc. and Ph.D. degrees in electrical engineering from the University of Seville, Seville, Spain, in 2000 and 2005, respectively. He currently holds the position of Associate Professor in the Department of Electronics Engineering, University of Seville. His research interests include microfluidics, inertial sensors, BioMEMS, and polymer microsystems. Dr. Luque was the Chairman of the IEEE Industrial Electronics Society Technical Committee on MEMS and Nanotechnology in 2008–2009, and member of the IEEE JMEMS Steering Committee during 2013. He was a recipient of the Burgen Scholarship from the Academia Europaea in 2007.

Affiliations and Expertise

Department of Electronics Engineering, University of Seville, Spain

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