Silicon-On-Insulator (SOI) Technology

1st Edition

Manufacture and Applications

Authors: O. Kononchuk B.-Y. Nguyen
Hardcover ISBN: 9780857095268
eBook ISBN: 9780857099259
Imprint: Woodhead Publishing
Published Date: 5th June 2014
Page Count: 496
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Table of Contents

  • Contributor contact details
  • Woodhead Publishing Series in Electronic and Optical Materials
  • Introduction
  • Part I: Silicon-on-insulator (SOI) materials and manufacture

    • 1. Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology

      • Abstract:
      • 1.1 Introduction
      • 1.2 SOI wafer fabrication technologies: an overview
      • 1.3 SOI volume-fabrication process
      • 1.4 SOI wafer structures and characterization
      • 1.5 Direct wafer bonding: wet surface cleaning techniques
      • 1.6 Characterization of direct bonding mechanisms
      • 1.7 Alternative surface preparation processes for Si and SiO2 direct bonding
      • 1.8 Mass production of SOI substrates by ion implantation, bonding and splitting: Smart Cut™ technology
      • 1.9 Fabrication of more complex SOI structures
      • 1.10 Fabrication of heterogeneous structures
      • 1.11 Conclusion
      • 1.12 Acknowledgments
      • 1.13 References
    • 2. Characterization of the electrical properties of advanced silicon-on-insulator (SOI) materials and transistors

      • Abstract:
      • 2.1 Introduction
      • 2.2 Conventional characterization techniques
      • 2.3 Characterization of SOI wafers using the pseudo-metal oxide semiconductor field effect transister (MOSFET) technique
      • 2.4 Developments in the pseudo-MOSFET technique
      • 2.5 Conventional methods for the characterization of FD MOSFETs
      • 2.6 Advanced methods for the characterization of FD MOSFETs
      • 2.7 Characterization of ultrathin SOI MOSFETs
      • 2.8 Characterization of multiple-gate MOSFETs
      • 2.9 Characterization of nanowire FETs
      • 2.10 Conclusions
      • 2.11 Acknowledgments
      • 2.12 References
    • 3. Modeling the performance of short-channel fully depleted silicon-on-insulator (SOI) metal oxide semiconductor field effect transistors (M


Silicon-On-Insulator (SOI) Technology: Manufacture and Applications covers SOI transistors and circuits, manufacture, and reliability. The book also looks at applications such as memory, power devices, and photonics.

The book is divided into two parts; part one covers SOI materials and manufacture, while part two covers SOI devices and applications. The book begins with chapters that introduce techniques for manufacturing SOI wafer technology, the electrical properties of advanced SOI materials, and modeling short-channel SOI semiconductor transistors. Both partially depleted and fully depleted SOI technologies are considered. Chapters 6 and 7 concern junctionless and fin-on-oxide field effect transistors. The challenges of variability and electrostatic discharge in CMOS devices are also addressed. Part two covers recent and established technologies. These include SOI transistors for radio frequency applications, SOI CMOS circuits for ultralow-power applications, and improving device performance by using 3D integration of SOI integrated circuits. Finally, chapters 13 and 14 consider SOI technology for photonic integrated circuits and for micro-electromechanical systems and nano-electromechanical sensors.

The extensive coverage provided by Silicon-On-Insulator (SOI) Technology makes the book a central resource for those working in the semiconductor industry, for circuit design engineers, and for academics. It is also important for electrical engineers in the automotive and consumer electronics sectors.

Key Features

  • Covers SOI transistors and circuits, as well as manufacturing processes and reliability
  • Looks at applications such as memory, power devices, and photonics


Circuit design engineers; Electrical engineers in the automotive and consumer electronics sectors; Semiconductor professionals at VLSI, MEMS, NEMS R&D and production facilities


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© Woodhead Publishing 2014
Woodhead Publishing
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"This book should be a central resource for those working in the semiconductor industry, for circuit design engineers, and for academics, as well as for electrical engineers in the automotive and consumer electronics sectors."--Advanced Substrate News,August 08,2014

About the Authors

O. Kononchuk Author

Chief Scientist at Soitec, France

Affiliations and Expertise

Soitec, France

B.-Y. Nguyen Author

Senior Fellow at Soitec, USA.

Affiliations and Expertise

Senior Fellow at Soitec, USA