Silicon Integrated Circuits - 1st Edition - ISBN: 9780120029600, 9781483214788

Silicon Integrated Circuits

1st Edition

Advances in Materials and Device Research

Editors: Dawon Kahng
eBook ISBN: 9781483214788
Imprint: Academic Press
Published Date: 24th July 1985
Page Count: 370
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Description

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron beams; pulsed melting; thermal flux annealing; rapid isothermal annealing; and several applications stemming from rapid annealing and semiconductor processing with directed-energy beams. The second chapter is concerned with the use of electron cyclotron resonance plasmas in two important materials processing techniques: reactive ion-beam etching and plasma deposition. The last chapter of the book deals with the exploding area of very large scale integration processing and process simulation. Physicists, chemists, and engineers involved in silicon integrated circuits will find the book invaluable.

Table of Contents


List of Contributors

Preface

Transient Thermal Processing of Silicon

I. Introduction

II. Adiabatic Annealing

III. Thermal Flux Annealing

IV. Isothermal Rapid Annealing

V. Related Rapid Thermal Processes

VI. Summary

References

Reactive Ion-Beam Etching and Plasma Deposition Techniques Using Electron Cyclotron Resonance Plasmas

I. Introduction

II. Reactive Ion-Beam Etching

III. Plasma Deposition

References

Physics of VLSI Processing and Process Simulation

I. Introduction

II. Physics of Processing and Process Simulation

III. Conclusions and the Future

References

Author Index

Subject Index

Details

No. of pages:
370
Language:
English
Copyright:
© Academic Press 1985
Published:
Imprint:
Academic Press
eBook ISBN:
9781483214788

About the Editor

Dawon Kahng