Silicon Epitaxy, Volume 72
1st Edition
Secure Checkout
Personal information is secured with SSL technology.Free Shipping
Free global shippingNo minimum order.
Table of Contents
1: CVD Technologies for Silicon: A Quick Survey 2: Epitaxial Growth Theory: Vapor-Phase Chemistry and Doping 3: Epitaxial Growth Facilities, Equipment, and Supplies 4: Epitaxial Growth Techniques 5: Epitaxial Growth Techniques: Molecular Beam Epitaxy 6: Epitaxial Growth Modeling 7: Epitaxial Layer Characterization and Metrology 8: Epitaxy for Discretes and Power Devices 9: Epitaxy on Patterned Wafers 10: Si-Based Alloys: SiGe and SiGe:C 11: Silicon Epitaxy: New Applications
Description
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded.
Readership
Researchers, graduate students, and practitioners working in the semiconductor field both at universities and in industry.
Details
- No. of pages:
- 491
- Language:
- English
- Copyright:
- © Academic Press 2001
- Published:
- 19th September 2001
- Imprint:
- Academic Press
- eBook ISBN:
- 9780080541006
Ratings and Reviews
About the Serial Editors
J. Rossi
R. K. Willardson
Affiliations and Expertise
WILLARDSON CONSULTING SPOKANE, WASHINGTON
Eicke Weber
Affiliations and Expertise
Fraunhofer-Institut für Solare Energiesysteme ISE, Freiburg, Germany
About the Serial Volume Editors
Danilo Crippa
Affiliations and Expertise
LPE Epitaxial Technology, Italy
Daniel Rode
Affiliations and Expertise
Washington University, St. Louis, Missouri, U.S.A.
Request Quote
Tax Exemption
Elsevier.com visitor survey
We are always looking for ways to improve customer experience on Elsevier.com.
We would like to ask you for a moment of your time to fill in a short questionnaire, at the end of your visit.
If you decide to participate, a new browser tab will open so you can complete the survey after you have completed your visit to this website.
Thanks in advance for your time.